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arXiv 2007.14431cond-mat.mtrl-scicond-mat.mes-hall
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金属接触对单层MoS2的影响

Uncovering the Effects of Metal Contacts on Monolayer MoS2

Kirstin Schauble, Dante Zakhidov, Eilam Yalon, Sanchit Deshmukh, Ryan W. Grady, Kayla A. Cooley, Connor J. McClellan, Sam Vaziri, Donata Passarello, Suzanne E. … 展开作者

Kirstin Schauble, Dante Zakhidov, Eilam Yalon, Sanchit Deshmukh, Ryan W. Grady, Kayla A. Cooley, Connor J. McClellan, Sam Vaziri, Donata Passarello, Suzanne E. Mohney, Michael F. Toney, A. K. Sood, Alberto Salleo, Eric Pop

摘要:

金属接触是二维(2D)半导体器件电子性能的关键限制因素。在这里,我们对七种金属(Y、Sc、Ag、Al、Ti、Au、Ni,功函数为3.1至5.2 eV)与通过化学气相沉积生长的单层MoS 2之间的接触界面进行了全面研究。我们在MoS 2上蒸镀金属薄膜,并通过拉曼光谱、X射线光电子能谱学、X射线衍射、透射电子显微镜和电学特性研究了界面。我们发现,1)氧化的Al掺杂MoS 2 n型(> 2 × 10^12 1/cm ^2)而不降低其迁移率,2)Ag,Au和Ni沉积对MoS 2造成不同程度的损伤(将拉曼E'峰从<3 1/cm加宽到>6 1/cm),3)Ti,Sc和Y与MoS 2反应。活性金属必须避免接触单层二硫化钼,但对照研究表明,反应主要限于多层膜的顶层。最后,我们发现4)薄金属不会显着应变MoS 2,通过X射线衍射证实。这些对于MoS 2的金属接触是重要的发现,并且广泛适用于许多其他2D半导体。

英文摘要:

Metal contacts are a key limiter to the electronic performance of two-dimensional (2D) semiconductor devices. Here we present a comprehensive study of contact interfaces between seven metals (Y, Sc, Ag, Al, Ti, Au, Ni, with work functions from 3.1 to 5.2 eV) and monolayer MoS2 grown by chemical vapor deposition. We evaporate thin metal films onto MoS2 and study the interfaces by Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction, transmission electron microscopy, and electrical characterization. We uncover that, 1) ultrathin oxidized Al dopes MoS2 n-type (> 2x10^12 1/cm^2) without degrading its mobility, 2) Ag, Au, and Ni deposition causes varying levels of damage to MoS2 (broadening Raman E' peak from <3 1/cm to >6 1/cm), and 3) Ti, Sc, and Y react with MoS2. Reactive metals must be avoided in contacts to monolayer MoS2, but control studies reveal the reaction is mostly limited to the top layer of multilayer films. Finally, we find that 4) thin metals do not significantly strain MoS2, as confirmed by X-ray diffraction. These are important findings for metal contacts to MoS2, and broadly applicable to many other 2D semiconductors.

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