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arXiv 2106.08673cond-mat.mtrl-sciphysics.app-ph
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与合成单层MoS2接触的统计分析

Statistical Analysis of Contacts to Synthetic Monolayer MoS2

Aravindh Kumar, Alvin Tang, H. -S. Philip Wong, Krishna Saraswat

摘要:

二维(2D)半导体是用于缩放晶体管的有希望的候选者,因为它们在单层极限下不受迁移率退化的影响。然而,诸如MoS 2的2D半导体的亚10 nm缩放受到接触电阻的限制。在这项工作中,我们第一次展示了一个统计研究金接触化学气相沉积单层二硫化钼使用传输线模型(TLM)结构,电介质封装前后。我们报告的接触电阻值低至330 ohm-um,这是迄今为止报告的最低值。我们进一步研究了Al 2 O3封装对接触电阻和其他器件指标变化的影响。最后,我们注意到在背栅配置的短沟道器件的TLM模型中的一些偏差,并讨论可能的修改,以提高模型的准确性。

英文摘要:

Two-dimensional (2D) semiconductors are promising candidates for scaled transistors because they are immune to mobility degradation at the monolayer limit. However, sub-10 nm scaling of 2D semiconductors, such as MoS2, is limited by the contact resistance. In this work, we show for the first time a statistical study of Au contacts to chemical vapor deposited monolayer MoS2 using transmission line model (TLM) structures, before and after dielectric encapsulation. We report contact resistance values as low as 330 ohm-um, which is the lowest value reported to date. We further study the effect of Al2O3 encapsulation on variability in contact resistance and other device metrics. Finally, we note some deviations in the TLM model for short-channel devices in the back-gated configuration and discuss possible modifications to improve the model accuracy.

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