Recent demonstrations of ultracoherent nanomechanical resonators introduce the prospect of new protocols for solid state sensing applications. Here, we propose to use two coupled ultracoherent resonator modes on a Si$_3$N$_4$ membrane for the detection of small nuclear spin ensembles. To this end, we employ parametric frequency conversion between nondegenerate modes. The nondegenerate modes result from coupled degenerate resonators, and the parametric conversion is mediated by periodic inversions of the nuclear spins in the presence of a magnetic scanning tip. We analyze potential noise sources and derive the achievable signal-to-noise ratio with typical experimental parameter values. Our proposal reconciles the geometric constraints of optomechanical systems with the requirements of scanning force microscopy and brings forth a new platform for spin-phonon interaction and spin imaging.
We report the experimental studies on an acoustic scatterer consisting of a pair of coupled decorated membrane resonators (DMRs) that exhibits near extreme contrast in reflection asymmetry and strong Willis coupling coefficient with amplitude of 2.5 and polarizability cross term of 1.1 x 10-8 ms2. The design is based on the theoretical analysis using the Greens function formulism we developed earlier. The clean line shapes of the real and the imaginary parts of the Willis coefficient clear show, even by visual inspection, that the Kramers-Kronig relations are satisfied. Theoretical analysis ag…
We design extremely-thin acoustic metasurfaces, providing a versatile platform for the manipulation of reflected pressure fields, that are constructed from mass loads and stretched membranes fixed to a periodic rigid framework. These metasurfaces demonstrate deeply subwavelength control and can have thicknesses an order of magnitude less than those based around Helmholtz resonators. Each sub-unit of the metasurface is resonant at a frequency tuned geometrically, this tunability provides phase control and using a set of finely tuned membrane resonators we create a phase-grating metasurface. Thi…
Feedback-based control techniques are useful tools in precision measurements as they allow to actively shape the mechanical response of high quality factor oscillators used in force detection measurements. In this paper we implement a feedback technique on a high-stress low-loss SiN membrane resonator, exploiting the charges trapped on the dielectric membrane. A properly delayed feedback force (dissipative feedback) enables the narrowing of the thermomechanical displacement variance in a similar manner to the cooling of the normal mechanical mode down to an effective temperature Te f f . In th…
In this work, we present the effects of stochastic force generated by white noise on the nonlinear dynamics of a circular silicon nitride membrane. By tuning the membrane to the Duffing nonlinear region, detected signals switching between low- and high- amplitudes have been observed. They are generated by noise-assisted random jumps between bistable states at room temperature and exhibit high sensitivity to the driving frequency. Through artificially heating different mechanical vibration modes by external input of white noise, the switching rate exhibits exponential dependence on the effectiv…
Herein we firstly introduce a straightforward, scalable and technologically relevant strategy to manufacture charged porous polymer membranes (CPMs) in a controllable manner. The pore sizes and porous architectures of CPMs are well-controlled by rational choice of anions in poly(ionic liquid)s (PILs). Continuously, heteroatom-doped hierarchically porous carbon membrane (HCMs) can be readily fabricated via morphology-maintaining carbonization of as-prepared CPMs. These HCMs being as photothermal membranes exhibited excellent performance for solar seawater desalination, representing a promising …
We report the experimental demonstration of tunable asymmetric acoustic metasurfaces with extreme contrast, made by two decorated membrane resonators (DMRs) coupled via a sealed air column. The front side of the metasurface is impedance matched to air and perfectly absorbing, while the backside is hard and totally reflecting. When a suitable DC voltage is applied to the backside DMR with proper electrodes, the surface impedance of the back side of the metasurfaces can be tuned from one extreme to the other, such that the backside becomes impedance matched to air and totally absorbing, while th…
We study experimentally and theoretically the phenomenon of persistent response in ultra-strongly driven membrane resonators. This term denotes the development of a vibrating state with nearly constant amplitude over an extreme wide frequency range. We reveal the underlying mechanism of the persistent response state by directly imaging the vibrational state using advanced optical interferometry. We argue that the persistent state is related to the nonlinear interaction between higher order flexural modes and higher-order overtones of the driven mode. Finally, we propose a stability diagram for…
Thermo-elastic conversion of electromagnetic wave into ultrasound wave has enabled diverse biomedical applications such as photoacoustic imaging. Microwave, which has ~10 cm long wavelength, can penetrate deeper into tissue than photons, heralding exciting applications such as deep tissue imaging via thermo-acoustic tomography. However, the thermo-acoustic conversion efficiency is very low even with an exogenous contrast agent such as carbon nanotube. Here, we break this low conversion limit through using a split ring resonator (SRR) to effectively collect and concentrate the microwave energy …
Free-standing silicon nitride (SiN) mechanical resonators are of central interests in applications such as temperature and mass sensing, and for fundamental optomechanical reasearch. Understanding thermal coupling between a membrane resonator and its environment is required for predicting thermal noise, frequency noise, as well as sensors responses to temperature changes. In this work, we provide closed-form derivations of intrinsic thermal coupling quantities in free-standing thin films, namely total thermal conductance with the surroundings, thermal response time, and the relative contributi…
We present the first system penalty measurements for all-optical wavelength conversion in an integrated ring resonator. We achieve wavelength conversion over a range of 27.7nm in the C-band at 2.5 Gb/s by exploiting four wave mixing in a CMOS compatible, high index glass ring resonator at ~22 dBm average pump power, obtaining < 0.3 dB system penalty.
We demonstrate quasi-phase matched, triply-resonant sum frequency conversion in 10.6-um-diameter integrated gallium phosphide ring resonators. A small-signal, waveguide-to-waveguide power conversion efficiency of 8%/mW is measured for conversion from telecom (1536 nm) and near infrared (1117 nm) to visible (647 nm) wavelengths with an absolute power conversion efficiency of 6.3% measured at saturation pump power. For the complementary difference frequency generation process, a single photon conversion efficiency of 7.2%/mW from visible to telecom is projected for resonators with optimized coup…
Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their resonance frequency. As such, gaining an understanding of heat transport in SiN resonators as well as their sensing noise limitations is of interest, both of which are goals of the present work. We first present new experimental results on radiative heat transport in SiN membrane, which we use for benchmarking two recently proposed theoretical models. We measure the characteristic thermal response time of square SiN m…
We investigate the sideband spectra of a driven nonlinear mode with its eigenfrequency being modulated at a low frequency (< 1 kHz). This additional parametric modulation leads to prominent antiresonance lineshapes in the sideband spectra, which can be controlled through the vibration state of the driven mode. We also establish a direct connection between the antiresonance frequency and the squeezing of thermal fluctuation in the system. Our work not only provides a simple and robust method for squeezing characterization but also opens a new possibility toward sideband applications.
We image and characterize the mechanical modes of a 2D drum resonator made of hBN suspended over a high-stress Si$_3$N$_4$ membrane. Our measurements demonstrate hybridization between various modes of the hBN resonator and those of the Si$_3$N$_4$ membrane. The measured resonance frequencies and spatial profiles of the modes are consistent with finite-element simulations based on an idealized geometry. Spectra of the thermal motion reveal that, depending on the degree of hybridization with modes of the heavier and higher-quality-factor Si$_3$N$_4$ membrane, the quality factors and the motional…
Dissipation dilution enables extremely low linear loss in stressed, high-aspect ratio nanomechanical resonators, such as strings or membranes. Here, we report on the observation and theoretical modelling of nonlinear dissipation in such structures. We introduce an analytical model based on von Kármán theory, which can be numerically evaluated using finite-element models for arbitrary geometries. We use this approach to predict nonlinear loss and (Duffing) frequency shift in ultracoherent phononic membrane resonators. A set of systematic measurements with silicon nitride membranes shows good ag…
Second harmonic conversion from 1550~nm to 775~nm with an efficiency of 400% W$^{-1}$ is demonstrated in a gallium phosphide (GaP) on oxide integrated photonic platform. The platform consists of doubly-resonant, phase-matched ring resonators with quality factors $Q \sim 10^4$, low mode volumes $V \sim 30 (λ/n)^3$, and high nonlinear mode overlaps. Measurements and simulations indicate that conversion efficiencies can be increased by a factor of 20 by improving the waveguide-cavity coupling to achieve critical coupling in current devices.
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for fabricating these devices often lack flexibility. While photolithography requires printing of an expensive photomask for each new design iteration, electron-beam lithography is extremely slow and commands high equipment cost. Here we demonstrate maskless rapid prototyping of freestanding SiN nanomechanical resonators fabricated by femtosecond laser ablation of …
The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure sensing applications. Here, we study the squeeze-film effect in single layer graphene resonators and find that their resonance frequency is lower than expected from models assuming ideal compression. To understand this deviation, we perform Boltzmann and continuum fini…
Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components, including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q factors) approaching 10$^$4. Finally, w…
Reverse electrodialysis is a promising method to harvest the osmotic energy stored between seawater and freshwater, but it has been a long-standing challenge to fabricate permselective membranes with the power density surpassing the industry benchmark of 5.0 W $m^{-2}$ for half a century. Herein, we report a vertically-oriented graphene oxide membranes (V-GOMs) with the combination of high ion selectivity and ultrafast ion permeation, whose permeation is three orders of magnitude higher than the extensively studied horizontally stacked GOMs (H-GOMs). By mixing artificial seawater and river wat…
We demonstrate conversion of up to 4.5 GHz-frequency microwaves to 1500 nm-wavelength light using optomechanical interactions on suspended thin-film lithium niobate. Our method utilizes an interdigital transducer that drives a free-standing 100 $μ$m-long thin-film acoustic resonator to modulate light travelling in a Mach-Zehnder interferometer or racetrack cavity. Owing to the strong microwave-to-acoustic coupling offered by the transducer in conjunction with the strong photoelastic, piezoelectric, and electro-optic effects of lithium niobate, we achieve a half-wave voltage of $V_π$ = 4.6 V an…
Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface that is only weakly bound by van der Waals interactions, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity of pressure sensors to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nano-mechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/…
Complex oxide thin films and heterostructures exhibit a profusion of exotic phenomena, often resulting from the intricate interplay between film and substrate. Recently it has become possible to isolate epitaxially grown single-crystalline layers of these materials, enabling the study of their properties in the absence of interface effects. In this work, we create ultrathin membranes of strongly correlated materials and demonstrate top-down fabrication of nanomechanical resonators made out of \ce{SrTiO3} and \ce{SrRuO3}. Using laser interferometry, we successfully actuate and measure the motio…
We realize a potential platform for an efficient spin-photon interface, namely negatively-charged silicon-vacancy centers in a diamond membrane coupled to the mode of a fully-tunable, fiber-based, optical resonator. We demonstrate that introducing the thin ($\sim 200 \, \text{nm}$), single crystal diamond membrane into the mode of the resonator does not change the cavity properties, which is one of the crucial points for an efficient spin-photon interface. In particular, we observe constantly high Finesse values of up to $3000$ and a linear dispersion in the presence of the membrane. We observ…
We experimentally achieve wave mode conversion and rainbow trapping in an elastic waveguide loaded with an array of resonators. Rainbow trapping is a phenomenon that induces wave confinement as a result of a spatial variation of the wave velocity, here promoted by gently varying the length of consecutive resonators. By breaking the geometrical symmetry of the waveguide, we combine the wave speed reduction with a reflection mechanism that mode-converts flexural waves impinging on the array into torsional waves travelling along opposite directions. The framework presented herein may open opportu…
We investigate the electromechanical actuation of a pair of suspended silicon nitride membranes forming a monolithic optomechanical array. By controlling the membrane resonators' tensile stress via a piezoelectrically controlled compressive force applied to the membrane chip we demonstrate noninvasive tuning of their mechanical mode spectrum, as well as strong intermode electromechanical coupling. Piezoelectric actuation is also shown to enhance the nonlinear response of the membranes, which is evidenced either by parametric amplification of the fundamental mode thermal fluctuations or by reso…
Wyant College of Optical Sciences, University of Arizona（亚利桑那大学怀雅特光学学院）；Mechanical, Automotive and Materials Engineering, University of Windsor（温莎大学机械、汽车与材料工程系）
We develop a stoichiometric SiN membrane-based optoelectromechanical system, in which the properties of the mechanical resonator can be dynamically controlled by the piezoelectric actuation. The mode splitting is observed in the mechanical response spectra of a phase-sensitive degenerate parametric amplifier. In addition, the quality factor Q of the membrane oscillator in this process is signicantly enhanced by more than two orders of magnitude due to the coherent amplication, reaching a Q factor of ~ 3*10^8 and a f*Q product of ~ 8*10^14 at room temperature. The thermomechanical noise squeezi…
