AI 中文总结
研究光机械加速度测量，通过贝叶斯优化氮化硅膜发现帆状蹦床谐振器，频率降且保持Q质量积，展示相关器件性能，实现低温帆状膜阵列，可用于新物理搜索和分布式量子传感实验。
AI 中文摘要
应变膜谐振器已成为光机械加速度测量的一个有前景的平台；然而，低频和高Q质量积的理想组合需要重新思考其耗散稀释工程。将贝叶斯优化应用于氮化硅膜，发现了一类帆状蹦床谐振器，频率降低一个数量级，同时保持Q质量积。展示了厘米级帆，频率为kHz，Q~10^7，Q×质量~10g。将7kHz器件与纳米带垂直集成，实现了室温热噪声为40ng0/√Hz的单片腔光机械加速度计，足以在4kHz带宽内分辨μg0/√Hz的环境振动，位移精度为10^-14m/√Hz。低温帆状膜阵列可能对新物理搜索和分布式量子传感实验有吸引力。
英文摘要
Strained membrane resonators have emerged as a promising platform for optomechanical accelerometry; however, the desired combination of low frequency and high $Q$-mass product requires a rethinking of their dissipation dilution engineering. Applying Bayesian optimization to a Si$_3$N$_4$ membrane, we discover a class of sail-like trampoline resonators in which the frequency is decreased by an order of magnitude while preserving the $Q$-mass product. We demonstrate centimeter-scale sails with kHz frequencies, $Q\sim10^7$ and $Q\times\text{mass}\sim$ 10 g. Vertically integrating a 7 kHz device with a nanoribbon, we realize a monolithic cavity optomechanical accelerometer with a room temperature thermal noise of $40\;\text{n}g_0/\sqrt{\text{Hz}}$, sufficient to resolve $μg_0/\sqrt{\text{Hz}}$ ambient vibration over a bandwidth of 4 kHz with a displacement imprecision of $10^{-14}\;\text{m}/\sqrt{\text{Hz}}$. Cryogenic arrays of sail membranes may be attractive for new physics searches and distributed quantum sensing experiments.
CommentsAdded additional funding awcknowledgement
