具有近红外单光子灵敏度的超导微丝探测器
Superconducting microwire detectors with single-photon sensitivity in the near-infrared
摘要：
本文报道了线宽为1 μm ~ 3 μm的单光子灵敏WSi超导探测器的研制和性能表征。该器件在1.55 μm波长处达到饱和内部探测效率，最大计数率超过10^5 s^-1。我们还研究了用于这些器件的富硅WSi薄膜的材料特性。我们发现，许多器件的有效长度为几百微米表现出临界电流超过50%的depairing电流。在362 x362 μm^2的表面积上展示了一个线宽为2.0 μm的曲折探测器，展示了所获得的材料和器件质量。
英文摘要：
We report on the fabrication and characterization of single-photon-sensitive WSi superconducting detectors with wire widths from 1 μm to 3 μm. The devices achieve saturated internal detection efficiency at 1.55 μm wavelength and exhibit maximum count rates in excess of 10^5 s^-1. We also investigate the material properties of the silicon-rich WSi films used for these devices. We find that many devices with active lengths of several hundred microns exhibit critical currents in excess of 50% of the depairing current. A meandered detector with 2.0 μm wire width is demonstrated over a surface area of 362x362 μm^2, showcasing the material and device quality achieved.
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