We report the fabrication of diverse light guiding structures embedded in oxidised porous silicon (OPS) by means of patterned pore filling through a single photoresist mask. The pores of OPS were filled with KDP salt from unsaturated solution applied on the sample's surface. Photolithography was used to create the mask. The created structures include straight, bent and tapered waveguides of different widths, and Y-splitters. Light guiding was demonstrated and characterised at wavelength of 1.064 microns.
To improve the light extraction efficiency of organic light emitting diodes (OLEDs), we developed a novel substrate, i.e., a metamaterial based flat Moire micro-lens array formed using double nanoimprint, termed Mlens-array, consisting of a hexagonal moiré pattern pillar array. By choosing a low refractive index dielectric material for the pillar array and a high refractive index dielectric material for the layer capped on top of the pillar array, we fabricated the Mlens-array behaving as a conventional convex optical micro-lens array. The Mlens-array was fabricated on a 4-inch wafer-size glas…
The recently proposed bianisotropic acoustic metagratings offer promising opportunities for passive acoustic wavefront manipulation, which is of particular interest in flat acoustic lenses and ultrasound imaging at ultra-high frequency ultrasound. Despite this fact, acoustic metagratings have never been scaled to MHz frequencies that are common in ultrasound imaging. One of the greatest challenges is the production of complex structures of microscopic size. Owing to two-photon polymerization, a novel fabrication technique from the view of acoustic metamaterials, it is now possible to precisely…
Self-organized semiconductor quantum dots represent almost ideal two-level systems, which have strong potential to applications in photonic quantum technologies. For instance, they can act as emitters in close-to-ideal quantum light sources. Coupled quantum dot systems with significantly increased functionality are potentially of even stronger interest since they can be used to host ultra-stable singlet-triplet spin qubits for efficient spin-photon interfaces and for a deterministic photonic 2D cluster-state generation. We realize an advanced quantum dot molecule (QDM) device and demonstrate e…
High performance lead zirconate titanate (PZT) ceramics with aligned porosity for sensing applications were fabricated by an ice-templating method. To demonstrate the enhanced properties of these materials and their potential for sensor and hydrophone applications, the piezoelectric voltage constants hydrostatic parameters and AC conductivity as a function of the porosity in directions both parallel and perpendicular to the freezing temperature gradient were studied. As the porosity level was increased, PZT poled parallel to the freezing direction exhibited the highest coefficients, and hydros…
Nanofabrication techniques for superconducting qubits rely on resist-based masks patterned by electron-beam or optical lithography. We have developed an alternative nanofabrication technique based on free-standing silicon shadow masks fabricated from silicon-on-insulator wafers. These silicon shadow masks not only eliminate organic residues associated with resist-based lithography, but also provide a pathway to better understand and control surface-dielectric losses in superconducting qubits by decoupling mask fabrication from substrate preparation. We have successfully fabricated aluminum 3D …
Despite the fact that the resolution of conventional contact/proximity lithography can reach feature sizes down to ~0.5-0.6 micrometers, the accurate control of the linewidth and uniformity becomes already very challenging for gratings with periods in the range of 1-2 μm. This is particularly relevant for the exposure of large areas and wafers thinner than 300μm. If the wafer or mask surface is not fully flat due to any kind of defects, such as bowing/warpage or remaining topography of the surface in case of overlay exposures, noticeable linewidth variations or complete failure of lithography …
We report a daytime passive radiative cooler using chemically fabricated porous anodic aluminum oxide (AAO) membranes. Effective medium theory (EMT) has been applied to analyzing the optical properties of the air-doped porous medium. The composite structure is specifically optimized so that it has a high absorbance (emittance) in the far-infrared atmospheric window and nearly no loss in the solar spectrum. The calculated emittance is well reproduced in the experiment by our AAO sample. The fabricated porous membrane shows a potential cooling power density of 64 W/m2 at ambient (humidity = 75%)…
Surface-relief gratings fabricated through nanoimprint lithography (NIL) are prone to topographic distortion induced by resist shrinkage. Characterizing the impact of this effect on blazed diffraction efficiency is particularly important for applications in astrophysical spectroscopy at soft x-ray wavelengths ($λ\approx 0.5 - 5$~nm) that call for the mass-production of large-area grating replicas with sub-micron, sawtooth surface-relief profiles. A variant of NIL that lends itself well for this task is substrate-conformal imprint lithography (SCIL), which uses a flexible, composite stamp forme…
Developing a suitable production method for three-dimensional periodic nanostructures with high aspect ratios is a subject of growing interest. For mass production, Talbot lithography offers many advantages. However, one disadvantage is that the minimum period of the light intensity distribution is limited by the period of the diffraction grating used. To enhance the aspect ratio of fabricated nanostructures, in the present study we focus on multi-wave interference between diffracted waves created using the Talbot effect. We propose a unique exposure method to generate multi-wave interference …
Microfluidics is an established multidisciplinary research domain with widespread applications in the fields of medicine, biotechnology and engineering. Conventional production methods of microfluidic chips have been limited to planar structures, preventing the exploitation of truly three-dimensional architectures for applications such as multi-phase droplet preparation or wet-phase fibre spinning. Here the challenge of nanofabrication inside a microfluidic chip is tackled for the showcase of a spider-inspired spinneret. Multiphoton lithography, an additive manufacturing method, was used to pr…
A new method of introducing nanopores with spongy morphology during fabrication of size and pitch controlled flexible silicon microwires (SiMWs) in wafer scale is presented using nanosphere lithography technique in addition to metal catalyzed electroless etching technique by varying concentration of oxidant and introducing surfactant or co-solvents to the etching solution. For achieving self-assembled monolayer closed-pack pattern of SiO2 microparticles in wafer-scale simple spin coating process was used. The effect of variation of the etchant, oxidant and surfactant on the morphology and opti…
Features of thermal transport in multilayered porous silicon nanostructures are considered. Such nanostructures were fabricated by electrochemical etching of monocrystalline Si substrates by applying periodically changed current density. Hereby, the multilayered structures with specific phononic properties were formed. Photoacoustic (PA) technique in gas-microphone configuration was applied for thermal conductivity evaluation. Experimental amplitude-frequency dependencies were adjusted by temperature distribution simulation with thermal conductivity of the multilayered porous structure as a fi…
Recent progress achieved in metal-assisted chemical etching (MACE) has enabled the production of high-quality micropillar arrays for various optoelectronic applications. Si micropillars produced by MACE often show a porous Si/SiOx shell on crystalline pillar cores introduced by local electrochemical reactions. In this paper, we report the distinct optoelectronic characteristics of the porous Si/SiOx shell correlated to their chemical compositions. Local photoluminescent (PL) images obtained with an immersion oil objective lens in confocal microscopy show a red emission peak (about 650 nm) alon…
Recently, studies have been carried out on attempts to combine surface-enhanced Surface-enhanced Raman spectroscopy (SERS) substrates that can be based on either localized surface plasmon (LSP) or surface plasmon polaritons (SPP) structures. By combining these two systems, the drawbacks of each other can be solved. However, the manufacturing methods involved so far are sophisticated, labor-intensive, expensive, and also technically demanding. We propose a facile method for the fabrication of a flexible plasmonic nanoslit SERS sensor. We utilized the pattern on periodic optical disks (DVD-R) as…
Plane-parallel resonator configuration is proposed for high-NA EUV lithography, where the lithography mask and the wafer are parallelly arranged through two focusing mirrors. EUV light is injected through an off-axis rotating mirror at the back focal plane and provides off-axis illumination (precession beam) to the mask and bounces back twice (at the mask and the wafer), finally goes out from the resonator through the rotating mirror. This is a single path cavity, there is no resonant effect. The orbital error or vibration of the rotating mirror do not affect on the imaging quality. The off-ax…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for fabricating these devices often lack flexibility. While photolithography requires printing of an expensive photomask for each new design iteration, electron-beam lithography is extremely slow and commands high equipment cost. Here we demonstrate maskless rapid prototyping of freestanding SiN nanomechanical resonators fabricated by femtosecond laser ablation of …
Over the last two decades, prototype devices for future classical and quantum computing technologies have been fabricated, by using scanning tunneling microscopy and hydrogen resist lithography to position phosphorus atoms in silicon with atomic-scale precision. Despite these successes, phosphine remains the only donor precursor molecule to have been demonstrated as compatible with the hydrogen resist lithography technique. The potential benefits of atomic-scale placement of alternative dopant species have, until now, remained unexplored. In this work, we demonstrate successful fabrication of …
Pulsed-laser dry printing of noble-metal microrings with a tunable internal porous structure, which can be revealed via an ion-beam etching post-procedure, was demonstrated. Abundance and average size of the pores inside the microrings were shown to be tuned in a wide range by varying incident pulse energy and a nitrogen doping level controlled in the process of magnetron deposition of the gold film in the appropriate gaseous environment. The fabricated porous microrings were shown to provide many-fold near-field enhancement of incident electromagnetic fields, which was confirmed by mapping of…
In this work we develop and study single-photon sources based on InGaAs quantum dots (QDs) emitting in the telecom O-band. The quantum devices are fabricated using in-situ electron beam lithography in combination with the thermocompression bonding to realize a backside gold mirror. Our structures are based on InGaAs/GaAs heterostructures, where the QD emission is redshifted towards the telecom O-band at 1.3 μm via a strain reducing layer. QDs pre-selected by cathodoluminescence mapping are embedded into mesa structures with a back-side gold mirror for enhanced photon-extraction efficiency. Pho…
We report a high Responsivity broad band photo-detector working in the wavelength range 400 nm to 1100 nm in a horizontal array of Si microlines (line width ~1 micron) fabricated on a Silicon-on-Insulator (SOI) wafer. The array was made using a combination of plasma etching, wet etching and electron beam lithography. It forms a partially suspended (nearly free) Silicon microstructure on SOI. The array detector under full illumination of the device shows a peak Responsivity of 18 A/W at 800 nm, at a bias of 1V which is more than an order of magnitude of the Responsivity in a commercial Si detec…
Electron beams can acquire designed phase modulations by passing through nanostructured material phase plates. These phase modulations enable electron wavefront shaping and benefit electron microscopy, spectroscopy, lithography, and interferometry. However, in the fabrication of electron phase plates, the typically used focused-ion-beam-milling method limits the fabrication throughput and hence the active area of the phase plates. Here, we fabricated large-area electron phase plates with electron-beam lithography and reactive-ion-etching. The phase plates are characterized by electron diffract…
A novel optical device is designed and fabricated in order to overcome the limits of the traditional sorter based on log-pol optical transformation for the demultiplexing of optical beams carrying orbital angular momentum (OAM). The proposed configuration simplifies the alignment procedure and significantly improves the compactness and miniaturization level of the optical architecture. Since the device requires to operate beyond the paraxial approximation, a rigorous formulation of transformation optics in the non-paraxial regime has been developed and applied. The sample has been fabricated a…
