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arXiv 1906.00519cond-mat.mtrl-sciphysics.app-phphysics.space-ph
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n型硅中子感生缺陷的超慢动态退火:载流子的作用

Ultra-Slow Dynamic Annealing of Neutron-induced Defects in n-type Silicon: Role of Charge Carriers

Ying Zhang, Yang Liu, Hang Zhou, Ping Yang, Jie Zhao, Yu Song

摘要:

用等注量(1 $\times$ 10 $^{10}$ cm $^{-2}$)和不同注量($2.5\times$ 10 $^5$ cm $^{-2}$ s $^{-1}$至$1\times$ 10 $^7$ cm $^{-2}$ s $^{-1}$)的中子轰击三种以n型硅为有源区的双极器件。基电流和输入偏置电流的测量值的增加被发现随中子通量的增加而减少,这意味着n型硅中双空位缺陷的动态退火的强度遵循正的通量依赖性。这种通量依赖性与使用质子的离子注入中观察到的通量依赖性相同,但是在我们的实验中明显的通量灵敏度比质子轰击的通量灵敏度低4个数量级,尽管两种粒子的质量和能量相似。质子轰击中大量的载流子的存在,提高了Si材料的扩散速度和缺陷团簇的解离速率,加速了缺陷的动态退火,从而导致了质子轰击过程中的通量范围的巨大差异。我们的工作将有助于理解硅中的缺陷退火过程。

英文摘要:

Neutron bombardments with equivalent fluence (1$\times$10$^{10}$ cm$^{-2}$) and different fluxes ($2.5\times$10$^5$ cm$^{-2}$s$^{-1}$ to $1\times$10$^7$ cm$^{-2}$s$^{-1}$) have been performed on three kinds of bipolar devices with n-type silicon as active regions. The measured increase of base currents and input bias currents are found to decrease with increasing neutron flux, implying that the strength of the dynamic annealing of divacancy defects in n-type silicon follows a positive flux dependence. Such a flux dependence is the same as that observed in ions implantation using protons, but the evident flux sensitivity in our experiment is 4 orders of magnitude lower than that of proton bombardment, despite the similarity in the masses and energies of the two particles. The huge discrepancy of flux range is attributed to the presence of vast charge carriers in proton bombardments, which strongly accelerate the dynamic annealing of defects by enhancing the diffusion velocity of Si interstitials and dissociation rate of defect clusters. Our work would contribute to the understanding of the defect annealing processes in silicon.

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