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arXiv 1807.07592cond-mat.mtrl-sciphysics.app-ph
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气相硫化法生长的层状MoS_{2}的介电性能和离子输运

Dielectric Properties and Ion Transport in Layered MoS_{2} Grown by Vapor-Phase Sulfurization

M. Belete, S. Kataria, U. Koch, M. Kruth, C. Engelhard, J. Mayer, O. Engström, M. C. Lemme

摘要:

采用电容-电压和电导-电压技术研究了气相生长MoS_{2}在金属/ MoS_{2} /硅电容器结构中的电子和介电性能。分析方法证实了MoS_{2}层状结构、界面氧化硅(SiO_{x})的存在和膜的组成。结合理论考虑的电特性量化了Si与Si和MoS_{2}之间的2.5 - 3 nm厚的氧化硅中间层之间的界面处的电子态浓度。电场应力下的测量表明,在MoS_{2}中存在与界面态相互作用的移动离子。基于飞行时间二次离子质谱,我们提出OH^{-}离子作为可能的候选人负责的意见。从100 KHz下的CV测量中提取的气相生长的MoS_{2}的介电常数在2.6至2.9的范围内。本研究的进展MoS_{2}中的缺陷和界面状态的理解。它还表明了在神经形态计算应用的2D材料设备中基于离子的可塑性的机会。

英文摘要:

Electronic and dielectric properties of vapor-phase grown MoS_{2} have been investigated in metal/MoS_{2}/silicon capacitor structures by capacitance-voltage and conductancevoltage techniques. Analytical methods confirm the MoS_{2} layered structure, the presence of interfacial silicon oxide (SiO_{x}) and the composition of the films. Electrical characteristics in combination with theoretical considerations quantify the concentration of electron states at the interface between Si and a 2.5 - 3 nm thick silicon oxide interlayer between Si and MoS_{2}. Measurements under electric field stress indicate the existence of mobile ions in MoS_{2} that interact with interface states. Based on time-offlight secondary ion mass spectrometry, we propose OH^{-} ions as probable candidates responsible for the observations. The dielectric constant of the vapor-phase grown MoS_{2} extracted from CV measurements at 100 KHz is in the range of 2.6 to 2.9. The present study advances the understanding of defects and interface states in MoS_{2}. It also indicates opportunities for ion-based plasticity in 2D material devices for neuromorphic computing applications.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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