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arXiv 1708.04852cond-mat.mtrl-sci
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Zn在InP中的复杂扩散机制

Complex diffusion mechanism of Zn in InP

Rafal Jakiela

摘要:

对InP:S体材料进行了Zn掺杂的注入和扩散。采用二次离子质谱和电容-电压法研究了锌离子浓度分布。我们发现退火的热力学条件影响Zn原子的扩散机制。过量磷空位的产生导致Zn掺杂剂通过络合物[ V_{P} - Zn_{In}- V_{P} ]扩散,产生具有陡峭斜率的特征扩散分布。这种电惰性的Zn配置导致比通常已知的替代机制中的扩散系数更低的扩散系数。

英文摘要:

Implantation and diffusion of Zn dopant into bulk InP:S were performed. Zn concentration profiles were investigated by secondary ion mass spectrometry and capacitance-voltage method. We find that thermodynamic conditions of annealing influence diffusion mechanism of Zn atoms. Excess phosphorus vacancies generation causes diffusion of Zn dopant by the complex [V_{P}-Zn_{In}-V_{P}] producing characteristic diffusion profile with the sharp slope. Such electrically inactive Zn configuration cause lower diffusion coefficient than that in the generally known interstitial-substitutional mechanism.

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