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arXiv 1702.07102cond-mat.mes-hall
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悬臂梁谐振腔中位置和模式相关的后Action探测

Position and Mode Dependent Optical Detection Back-Action in Cantilever Beam Resonators

T. Larsen. S. Schmid, S. Dohn, J. E. Sader, A. Boisen, L. G. Villanueva

摘要:

悬臂梁谐振或静态检测中的光学检测反作用在追求最先进的性能时提出了挑战。光学反作用的起源和最小化光学反作用的可能途径在文献中很少受到关注。本文研究了悬臂梁谐振腔中位置和模式相关的光学反作用。高功率加热激光(100 μW)扫描通过氮化硅悬臂梁,同时通过位于悬臂梁尖端的低功率读出激光(1 μW)检测其对前三个谐振模式的影响。我们发现,测量的反作用的效果不仅取决于位置,但也共振模式的形状。通过将前三个模式的温度相关频率响应拟合到有限元(FE)模拟来提取相关氮化硅材料参数。在第二轮模拟中,使用提取的参数,我们成功地拟合了FEM结果与测得的模式和位置相关的反作用。最后,描述了用于最小化这种光学检测反作用的影响的不同路线,从而允许总体上进一步改进基于光电倍增管的感测。

英文摘要:

Optical detection back-action in cantilever resonant or static detection presents a challenge when striving for state-of-the-art performance. The origin and possible routes for minimizing optical back-action have received little attention in literature. Here, we investigate the position and mode dependent optical back-action on cantilever beam resonators. A high power heating laser (100 μW) is scanned across a silicon nitride cantilever while its effect on the first three resonance modes is detected via a low-power readout laser (1 μW) positioned at the cantilever tip. We find that the measured effect of back-action is not only dependent on position but also the shape of the resonance mode. Relevant silicon nitride material parameters are extracted by fitting the temperature-dependent frequency response of the first three modes to finite element (FE) simulations. In a second round of simulations, using the extracted parameters, we successfully fit the FEM results with the measured mode and position dependent back-action. Finally, different routes for minimizing the effect of this optical detection back-action are described, allowing further improvements of cantilever-based sensing in general.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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