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arXiv 1702.04009physics.chem-ph
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热原子层沉积聚磷腈锂固体电解质制备纳米级固体电池

Nanoscale Solid State Batteries Enabled By Thermal Atomic Layer Deposition of a Lithium Polyphosphazene Solid State Electrolyte

Alexander J. Pearse, Thomas E. Schmitt, Elliot J. Fuller, Farid El-Gabaly, Chuan-Fu Lin, Konstantinos Gerasopoulos, Alexander C. Kozen, A. Alec Talin, Gary Rubl… 展开作者

Alexander J. Pearse, Thomas E. Schmitt, Elliot J. Fuller, Farid El-Gabaly, Chuan-Fu Lin, Konstantinos Gerasopoulos, Alexander C. Kozen, A. Alec Talin, Gary Rubloff, Keith E. Gregorcyzck

摘要:

新型能量存储技术的几个活跃研究领域,包括三维固态电池和用于反应性电池电极组件的钝化涂层,需要保形固态电解质。我们描述了用于锂磷氮氧化物(LiPON)家族的成员的原子层沉积(ALD)工艺,其用作薄膜锂导电固体电解质。叔丁醇锂(LiO $^t$ Bu)和氨基磷酸酯二乙酯(DEPA)之间的反应产生共形的离子导电薄膜,其化学计量接近250和300 $^\circ$ C之间的Li $_2$ PO $_2$ N。膜的P/N比总是1,表明LiPON的特定多晶型物非常类似于聚磷腈。在300 ℃下生长的膜在35 $^\circ$ ℃下具有$6.51\:(\pm0.36)\times10^{-7}$ S/cm的离子电导率,并且在相对于Li/Li $^+$的0至5.3V的窗口中是功能电化学稳定的。我们通过将ALD生长的电解质集成到全固态电池中来证明其可行性,所述全固态电池包括使用LiCoO $_2$作为阴极和Si作为阳极的薄膜装置,其在高达1 mA/cm $^2$下操作。ALD生长工艺的高质量允许即使在粗糙的结晶表面上也无针孔沉积,并且我们展示了具有迄今报道的最薄(<100 nm)固态电解质的薄膜电池的制造和操作。最后,我们展示了一个额外的应用程序的中温ALD过程中,通过演示一个灵活的固态电池上的聚合物基板。

英文摘要:

Several active areas of research in novel energy storage technologies, including three-dimensional solid state batteries and passivation coatings for reactive battery electrode components, require conformal solid state electrolytes. We describe an atomic layer deposition (ALD) process for a member of the lithium phosphorus oxynitride (LiPON) family, which is employed as a thin film lithium-conducting solid electrolyte. The reaction between lithium tert-butoxide (LiO$^t$Bu) and diethyl phosphoramidate (DEPA) produces conformal, ionically conductive thin films with a stoichiometry close to Li$_2$PO$_2$N between 250 and 300$^\circ$C. The P/N ratio of the films is always 1, indicative of a particular polymorph of LiPON which closely resembles a polyphosphazene. Films grown at 300$^\circ$C have an ionic conductivity of $6.51\:(\pm0.36)\times10^{-7}$ S/cm at 35$^\circ$C, and are functionally electrochemically stable in the window from 0 to 5.3V vs. Li/Li$^+$. We demonstrate the viability of the ALD-grown electrolyte by integrating it into full solid state batteries, including thin film devices using LiCoO$_2$ as the cathode and Si as the anode operating at up to 1 mA/cm$^2$. The high quality of the ALD growth process allows pinhole-free deposition even on rough crystalline surfaces, and we demonstrate the fabrication and operation of thin film batteries with the thinnest (<100nm) solid state electrolytes yet reported. Finally, we show an additional application of the moderate-temperature ALD process by demonstrating a flexible solid state battery fabricated on a polymer substrate.

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