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arXiv 1610.03471physics.ins-det
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用于高通量并行原子力显微镜的自动化悬臂梁交换和光学对准

Automated cantilever exchange and optical alignment for High-throughput, parallel atomic force microscopy

Tom Bijnagte, Geerten Kramer, Lukas Kramer, Bert Dekker, Rodolf Herfst, Hamed Sadeghian

摘要:

在原子力显微镜(AFM)中,AFM悬臂梁相对于光束和位置敏感探测器(PSD)的交换和对准通常是手动执行的。这个过程是繁琐和耗时的,有时会损坏悬臂或尖端。为了提高AFM在工业应用中的吞吐量,需要在非常短的时间内以足够的精度自动交换和对准悬臂的能力。在本文中,我们提出了一个自动化的悬臂梁交换和光学对准仪器的发展。我们提出了一个实验证明的原则,通过交换各种类型的AFM杠杆在6秒的精度优于2微米。交换和对准单元被小型化以允许集成在并行AFM中。验证器的可靠性也得到了评价。进行了一万次连续交换和对齐循环,没有发生故障。AFM悬臂的自动交换和对准克服了将AFM带入大批量制造和工业应用的一个大障碍。

英文摘要:

In atomic force microscopy (AFM), the exchange and alignment of the AFM cantilever with respect to the optical beam and position-sensitive detector (PSD) are often performed manually. This process is tedious and time-consuming and sometimes damages the cantilever or tip. To increase the throughput of AFM in industrial applications, the ability to automatically exchange and align the cantilever in a very short time with sufficient accuracy is required. In this paper, we present the development of an automated cantilever exchange and optical alignment instrument. We present an experimental proof of principle by exchanging various types of AFM cantilevers in 6 seconds with an accuracy better than 2 um. The exchange and alignment unit is miniaturized to allow for integration in a parallel AFM. The reliability of the demonstrator has also been evaluated. Ten thousand continuous exchange and alignment cycles were performed without failure. The automated exchange and alignment of the AFM cantilever overcome a large hurdle toward bringing AFM into high-volume manufacturing and industrial applications.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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