用于高分辨力谱的正交相位干涉仪
Quadrature phase interferometer for high resolution force spectroscopy
摘要：
在这篇文章中，我们提出了一个原子力显微镜（AFM）偏转测量装置。它是基于一个正交相位差分干涉仪：我们测量的光路之间的差异，反射的激光束的悬臂梁尖端和参考光束反射的传感器的静态基地。一个设计具有非常低的环境敏感性和另一个允许校准测量的宽光谱范围内进行描述。两者都能实现非常高的分辨率（低至$\SI{2.5E-15}{m/\sqrt{Hz}}$），通过AFM杠杆上的热噪声测量来说明。它们具有出色的长期稳定性和独立于干涉仪光学相位的恒定灵敏度。快速回顾表明，我们的精度等于或优于文献中报道的最佳结果，但对于更大的偏转范围，高达几个$\SI{}{\micro m}$。
英文摘要：
In this article, we present a deflection measurement setup for Atomic Force Microscopy (AFM). It is based on a quadrature phase differential interferometer: we measure the optical path difference between a laser beam reflecting above the cantilever tip and a reference beam reflecting on the static base of the sensor. A design with very low environmental susceptibility and another allowing calibrated measurements on a wide spectral range are described. Both enable a very high resolution (down to $\SI{2.5E-15}{m/\sqrt{Hz}}$), illustrated by thermal noise measurements on AFM cantilevers. They present an excellent long-term stability, and a constant sensitivity independent of the optical phase of the interferometer. A quick review shows that our precision is equaling or out-performing the best results reported in the literature, but for a much larger deflection range, up to a few $\SI{}{\micro m}$.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
