一种可靠的毫米波正交干涉仪
A Reliable Millimeter-Wave Quadrature Interferometer
摘要：
本文介绍一种简单、低成本的毫米波（70 GHz）干涉仪，其相位精度优于± 2 °，响应时间为10 ns。这种干涉仪的简单性使其成为测量实验室或半导体加工等离子体中电子密度的理想选择。相对高的精度和低成本是通过具有正交中频（IF）混频器的零差系统来实现的，该零差系统现在在毫米波频带中可商购获得。还描述了用于系统隔离器的磁屏蔽的设计和构造，该系统隔离器可能需要围绕磁约束等离子体。
英文摘要：
A simple, low-cost millimeter-wave (70 GHz) interferometer with a phase accuracy better than plus or minur 2 degrees, and a response time of 10 ns is described. The simplicity of this interferometer makes it ideal for measurement of electron densities in laboratory or semiconductor processing plasmas. The relative high accuracy and low cost are attained by a homodyne system with a quadrature intermediate frequency (IF) mixer, now commercially available in millimeter-wave frequency bands. The design and construction of magnetic shielding for the system isolator, which may be required around magnetically-confined plasmas, is also described.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
