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arXiv 1609.07993cond-mat.mtrl-sci
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制备工艺对氧化钼超薄膜稳定性的影响

Effects of processing on the stability of molybdenum oxide ultra-thin films

Aitana Tarazaga Martín-Luengo, Harald Köstenbauer, Jörg Winkler, Alberta Bonanni

摘要:

系统地研究了器件制造标准中常用的湿化学处理对氧化钼(MoOx)超薄膜的影响。我们结合X射线光电子能谱学(XPS),角分辨XPS和X射线反射率技术,以提供深刻的见解的组成,结构和电子状态的变化后,不同的初始化学计量比的反应溅射制备的薄膜处理。我们的研究结果表明,显着的还原效果与发展的间隙态MoOx,以及在薄膜的组成,密度和结构的变化,系统相关的初始氧化态的Mo。

英文摘要:

The effects of wet chemical processing conventionally employed in device fabrication standards are systematically studied on molybdenum oxide (MoOx) ultra-thin films. We have combined x-ray photoelectron spectroscopy (XPS), angle resolved XPS and x-ray reflectivity techniques to provide deep insights into the changes in composition, structure and electronic states upon treatment of films with different initial stoichiometry prepared by reactive sputtering. Our results show significant reduction effects associated with the development of gap states in MoOx, as well as changes in the composition, density and structure of the films, systematically correlated with the initial oxidation state of Mo.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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