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arXiv 1504.04888cond-mat.mtrl-sci
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化学气相沉积法制备原子级薄的光电级二硫化钼

Chemical Vapor Deposition Synthesized Atomically Thin Molybdenum Disulfide with Optoelectronic-Grade Crystalline Quality

Ismail Bilgin, Fangze Liu, Anthony Vargas, Andrew Winchester, Michael K. L. Man, Moneesh Upmanyu, Keshav M Dani, Gautam Gupta, Saikat Talapatra, Aditya D. Mohite, Swastik Kar

摘要:

在大面积和低成本下合成高质量样品的能力是任何新材料开发阶段的最大挑战之一。虽然化学气相沉积(CVD)方法为CMOS兼容的大规模材料生长提供了一种有前途的低成本途径,但它往往无法满足纳米电子学和光电子学的高质量要求。我们提出了大规模的CVD合成的单层和几层的MoS2使用直接气相硫化的MoO2,这使我们能够获得极高质量的单晶单层MoS2样品的场效应迁移率超过30 cm 2/Vs的单层。这些样品可以很容易地在各种衬底上合成,并在整个晶体的拉曼和光致发光映射中表现出高度的光电均匀性,面积超过数百平方微米。由于它们的高结晶质量,这些样品的拉曼光谱显示了一系列的多声子过程,通过与机械剥离样品的过去报告相比具有相等或更好的清晰度的峰。这使我们能够研究层厚度和衬底依赖性的极弱的声子过程在285 cm-1和487 cm-1的二维MoS2。这些样品的超高光电子级晶体质量可以通过光电流光谱法进一步建立,该光谱法在室温下清楚地揭示了激子态,这一壮举以前仅在用机械剥离制造的器件上得到证明,这些机械剥离是人工悬挂在沟槽上的。我们的方法反映了原子薄,2D MoS2的可扩展,高质量的光电子学的发展迈出了一大步。

英文摘要:

The ability to synthesize high-quality samples over large areas and at low cost is one of the biggest challenges during the developmental stage of any novel material. While chemical vapor deposition (CVD) methods provide a promising low-cost route for CMOS compatible, large-scale growth of materials, it often falls short of the high-quality demands in nanoelectronics and optoelectronics. We present large-scale CVD synthesis of single- and few- layered MoS2 using direct vapor-phase sulfurization of MoO2, which enables us to obtain extremely high-quality single-crystal monolayer MoS2 samples with field-effect mobility exceeding 30 cm2/Vs in monolayers. These samples can be readily synthesized on a variety of substrates, and demonstrate a high-degree of optoelectronic uniformity in Raman and photoluminescence mapping over entire crystals with areas exceeding hundreds of square micrometers. Owing to their high crystalline quality, Raman spectroscopy on these samples reveal a range of multi-phonon processes through peaks with equal or better clarity compared to past reports on mechanically exfoliated samples. This enables us to investigate the layer thickness- and substrate-dependence of the extremely weak phonon processes at 285 cm-1 and 487 cm-1 in 2D MoS2. The ultra-high, optoelectronic-grade crystalline quality of these samples could be further established through photocurrent spectroscopy, which clearly reveal excitonic states at room temperature, a feat that has been previously demonstrated only on device fabricated with mechanically exfoliated that were artificially suspended across trenches. Our method reflects a big step in the development of atomically thin, 2D MoS2 for scalable, high-quality optoelectronics.

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