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arXiv 1608.01623cond-mat.mtrl-sci
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共价材料中小缺陷团簇的辐射诱导迁移率

Radiation-induced mobility of small defect clusters in covalent materials

Hao Jiang, Li He, Dane Morgan, Paul M. Voyles, Izabela Szlufarska

摘要:

虽然缺陷团簇对半导体材料的电子和机械性能是有害的,但是由于高迁移势垒,这些团簇的湮灭受到它们缺乏热迁移率的限制。在这里,我们发现,在块状SiC(电子和核应用的重要共价材料)的小集群可以成为移动在室温下的电子辐射的影响下。到目前为止,直接观察到的辐射诱导的缺陷团簇在体材料中的扩散还没有得到证实。这一发现是通过低角度环形暗场(LAADF)扫描透射电子显微镜(STEM)结合非刚性配准技术来消除样品不稳定性,从而实现小迁移缺陷簇的原子分辨率成像。我们发现,这种非热扩散的基本机制是入射电子和团簇原子之间的弹道碰撞。我们的研究结果表明,在某些辐照条件下,缺陷团簇可能是移动的,改变目前的理解簇退火过程中辐照共价材料。

英文摘要:

Although defect clusters are detrimental to electronic and mechanical properties of semiconductor materials, annihilation of such clusters is limited by their lack of thermal mobility due to high migration barriers. Here, we find that small clusters in bulk SiC (a covalent material of importance for both electronic and nuclear applications) can become mobile at room temperature under the influence of electron radiation. So far, direct observation of radiation-induced diffusion of defect clusters in bulk materials has not been demonstrated yet. This finding was made possible by low angle annular dark field (LAADF) scanning transmission electron microscopy (STEM) combined with non-rigid registration technique to remove sample instability, which enables atomic resolution imaging of small migrating defect clusters. We show that the underlying mechanism of this athermal diffusion is ballistic collision between incoming electrons and cluster atoms. Our findings suggest that defect clusters may be mobile under certain irradiation conditions, changing current understanding of cluster annealing process in irradiated covalent materials.

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