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arXiv 1607.08145cond-mat.mtrl-sci
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石墨烯在hBN上的快速且无催化剂的CVD生长

Rapid and catalyst-free CVD growth of graphene on hBN

Neeraj Mishra, Vaidotas Miseikis, Domenica Convertino, Mauro Gemmi, Vincenzo Piazza, Camilla Coletti

摘要:

最近,六方氮化硼(h-BN)已被证明是作为一个理想的衬底石墨烯大大提高材料的传输性能,由于其原子级平坦的表面,低层间电子耦合和几乎完美的网状匹配。化学气相沉积(CVD)目前被认为是在h-BN上直接生长石墨烯的最可扩展的方法。然而,对于无催化剂的方法,通常报道了对石墨烯晶粒的形状和结晶度的不良控制以及低生长速率。在这项工作中,我们研究了不同形状的晶粒的结晶度,并确定了一个真正的范德华外延石墨烯的h-BN通过采用无催化剂的CVD工艺的路径。我们证明了多晶性质的圆形垫和属性的不同取向的颗粒的空气中的h-BN薄片的污染的堵塞。我们发现,六重对称的单晶颗粒可以通过采用高氢分压生长过程中获得。值得注意的是,通过优化生长温度和压力获得高达100 nm/min的生长速率。通过采用简单的CVD方法以可观的生长速率在h-BN上合成单晶石墨烯的可能性是朝着增加这种有前途的范德华异质结构的可及性迈出的一步。

英文摘要:

Recently, hexagonal boron nitride (h-BN) has been shown to act as an ideal substrate to graphene by greatly improving the material transport properties thanks to its atomically flat surface, low interlayer electronic coupling and almost perfect reticular matching. Chemical vapour deposition (CVD) is presently considered the most scalable approach to grow graphene directly on h-BN. However, for the catalyst-free approach, poor control over the shape and crystallinity of the graphene grains and low growth rates are typically reported. In this work we investigate the crystallinity of differently shaped grains and identify a path towards a real van der Waals epitaxy of graphene on h-BN by adopting a catalyst-free CVD process. We demonstrate the polycrystalline nature of circular-shaped pads and attribute the stemming of different oriented grains to airborne contamination of the h-BN flakes. We show that single-crystal grains with six-fold symmetry can be obtained by adopting high hydrogen partial pressures during growth. Notably, growth rates as high as 100 nm/min are obtained by optimizing growth temperature and pressure. The possibility of synthesizing single-crystal graphene on h-BN with appreciable growth rates by adopting a simple CVD approach is a step towards an increased accessibility of this promising van der Waals heterostructure.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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