arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 1402.5575physics.ins-detphysics.optics
收藏

可变合成波长双波长双外差干涉法高精度绝对距离测量

High-accuracy absolute distance measurement by two-wavelength double heterodyne interferometry with variable synthetic wavelengths

Yoshiyuki Kuramoto, Hiroshi Okuda

摘要:

提出了一种基于双波长干涉仪和可变合成波长技术的绝对距离测量干涉仪。波长扫描范围为12 GHz,通过在每个测量波长处的外差检测以1.0 mλ的相位精度实现。这种小的波长扫描范围使得能够使用分布式反馈激光二极管作为干涉仪光源,并通过注入电流控制实现快速的20 ms波长扫描时间。我们证明了高达1.5米的测量范围和精度优于1.2纳米的位移测量干涉仪相比,对应于10-9的相对精度。此外,还提出了扩大直线对撞机最大测量范围和补偿空气折射率的建议。

英文摘要:

We present an absolute distance measurement interferometer based on a two wavelength interferometer and a variable synthetic wavelength technique. The wavelength scanning range was 12 GHz, realized with a phase accuracy of 1.0 mλ by heterodyne detection at each measurement wavelength. This small wavelength scanning range enabled the use of distributed feedback laser diodes as an interferometer light source and a fast 20 ms wavelength scanning time by injection current control. We demonstrated a measurement range of up to 1.5 m and an accuracy better than 1.2 nm in comparison with a displacement measurement interferometer, corresponding to a relative accuracy of 10-9. In addition, we also proposed expanding the range of maximum measurement and compensation of refractive index of air for linear colliders.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑