频率扫描干涉法高精度绝对距离和振动测量
High-precision Absolute Distance and Vibration Measurement using Frequency Scanned Interferometry
摘要：
在本文中，我们报告了高精度的绝对距离和振动测量频率扫描干涉法使用一对单模光纤。通过对扫描激光频率时产生的干涉条纹计数来确定绝对距离。使用高精细度法布里-珀罗干涉仪（F-P）来确定扫描期间的频率变化。提出了两种多距离测量分析技术，以提高距离测量精度，并提取振动的振幅和频率。在实验室条件下，采用首次提出的多距离测量技术，在0.1 ~ 0.7 m的绝对距离范围内，测量精度达到了$\sim$ 50 nm。第二种分析技术能够在没有先验知识的情况下测量振动频率，范围从0.1 Hz到100 Hz，振幅小到几纳米。
英文摘要：
In this paper, we report high-precision absolute distance and vibration measurements performed with frequency scanned interferometry using a pair of single-mode optical fibers. Absolute distance was determined by counting the interference fringes produced while scanning the laser frequency. A high-finesse Fabry-Perot interferometer(F-P) was used to determine frequency changes during scanning. Two multiple-distance-measurement analysis techniques were developed to improve distance precision and to extract the amplitude and frequency of vibrations. Under laboratory conditions, measurement precision of $\sim$ 50 nm was achieved for absolute distances ranging from 0.1 meters to 0.7 meters by using the first multiple-distance-measurement technique. The second analysis technique has the capability to measure vibration frequencies ranging from 0.1 Hz to 100 Hz with amplitude as small as a few nanometers, without a priori knowledge.
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