频率扫描干涉法高精度绝对坐标测量
High-precision Absolute Coordinate Measurement using Frequency Scanned Interferometry
摘要：
在本文中，我们报告了高精度的绝对位置测量与频率扫描干涉（FSI）。我们以前报道过用FSI测量绝对距离[1]。绝对位置由同时测量的几个相关绝对距离确定。二维测量的精度优于1微米，三维测量中，X和Y上的精度被确认为低于1微米，而Z上的确认精度约为2微米，其中确认受到Z方向上移动台的较低精度的限制。
英文摘要：
In this paper, we report high-precision absolute position measurement performed with frequency scanned interferometry (FSI). We reported previously on measurement of absolute distance with FSI [1]. Absolute position is determined by several related absolute distances measured simultaneously. The achieved precision of 2-dimensional measurements is better than 1 micron, and in 3-dimensional measurements, the precision on X and Y is confirmed to be below 1 micron, while the confirmed precision on Z is about 2 microns, where the confirmation is limited by the lower precision of the moving stage in Z direction.
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