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arXiv 1307.7643cond-mat.mtrl-scicond-mat.mes-hall
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多层MoS2场效应晶体管的分子掺杂:薄层电阻和接触电阻的减小

Molecular Doping of Multilayer MoS2 Field-effect Transistors: Reduction in Sheet and Contact Resistances

Yuchen Du, Han Liu, Adam T. Neal, Mengwei Si, Peide D. Ye

摘要:

首次研究了聚乙烯亚胺(PEI)在多层二硫化钼场效应晶体管上的掺杂。薄层电阻降低了2.6倍,接触电阻降低了1.2倍。增强的电特性也反映在导通电流的70%的改善,和非本征场效应迁移率的50%的改善。阈值电压也证实了分子掺杂后的负位移。所有的研究都证明了PEI分子掺杂在MoS2晶体管中的可行性,以及其在层状结构半导体2D晶体中的潜在应用。

英文摘要:

For the first time, polyethyleneimine (PEI) doping on multilayer MoS2 field-effect transistors are investigated. A 2.6 times reduction in sheet resistance, and 1.2 times reduction in contact resistance have been achieved. The enhanced electrical characteristics are also reflected in a 70% improvement in ON current, and 50% improvement in extrinsic field-effect mobility. The threshold voltage also confirms a negative shift upon the molecular doping. All studies demonstrate the feasibility of PEI molecular doping in MoS2 transistors, and its potential applications in layer-structured semiconducting 2D crystals.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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