用于三模光声参量放大器的高品质因数镁硅机械谐振器
High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers
摘要：
毫克级谐振器已被证明适合于创建3模式光声参量放大器，基于先进的引力波探测器首次预测的现象。为了实现实用的光声参量放大，需要高品质因数的谐振器。我们提出了毫米级硅谐振器，其设计表现出频率在10^5 - 10^6 Hz范围内的扭转振动模式，用于在紧凑的桌面系统中观察3模式光声相互作用。我们的设计结合了一个隔离阶段，并最大限度地减少了光学涂层的声学损失。在室温和10^-3 Pa的压力下，我们观察到模式频率为401.5 kHz时的品质因数为7.5 x 10^5。我们通过映射谐振器的振幅响应并与有限元建模进行比较来确认模式形状。本研究有助于发展三模光声参量放大器，用于新型高灵敏度信号传感器和量子测量实验。
英文摘要：
Milligram-scale resonators have been shown to be suitable for the creation of 3-mode optoacoustic parametric amplifiers, based on a phenomena first predicted for advanced gravitational-wave detectors. To achieve practical optoacoustic parametric amplification, high quality factor resonators are required. We present millimetre-scale silicon resonators designed to exhibit a torsional vibration mode with a frequency in the 10^5 - 10^6 Hz range, for observation of 3-mode optoacoustic interactions in a compact table-top system. Our design incorporates an isolation stage and minimizes the acoustic loss from optical coating. We observe a quality factor of 7.5 x 10^5 for a mode frequency of 401.5 kHz, at room temperature and pressure of 10^-3 Pa. We confirmed the mode shape by mapping the amplitude response across the resonator and comparing to finite element modelling. This study contributes towards the development of 3-mode optoacoustic parametric amplifiers for use in novel high-sensitivity signal transducers and quantum measurement experiments.
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