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arXiv 1302.4534cond-mat.mtrl-sci
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非晶态高κ氧化物HfO2、ZrO2及其合金的结构和介电性能

Structure and Dielectric Properties of Amorphous High-kappa Oxides: HfO2, ZrO2 and their alloys

Yin Wang, Ferdows Zahid, Jian Wang, Hong Guo

摘要:

高$κ$金属氧化物是一类在现代器件物理和技术中发挥越来越重要作用的材料。在这里,我们报告的结构和晶格介电常数的大块非晶金属氧化物的性质的理论研究的经典分子动力学(MD)的结构演化和量子力学的第一性原理密度泛函理论(DFT)的电子结构分析相结合的方法。使用基于Born-Mayer-Buckingham势函数的经典分子动力学方法,在熔融和淬火方案中,生成了具有不同浓度值$x$的高$κ$金属氧化物Hf $_{1-x}$ Zr $_x$ O $_2$的非晶结构。配位数和径向分布函数的计算结果与相应的实验数据吻合较好。然后,我们计算的晶格介电常数的材料从量子力学的第一性原理,并在一个系综的样品的平均值同意与现有的实验数据,是非常接近的介电常数的立方形式。

英文摘要:

High-$κ$ metal oxides are a class of materials playing an increasingly important role in modern device physics and technology. Here we report theoretical investigations of the properties of structural and lattice dielectric constants of bulk amorphous metal oxides by a combined approach of classical molecular dynamics (MD) - for structure evolution, and quantum mechanical first principles density function theory (DFT) - for electronic structure analysis. Using classical MD based on the Born-Mayer-Buckingham potential function within a melt and quench scheme, amorphous structures of high-$κ$ metal oxides Hf$_{1-x}$Zr$_x$O$_2$ with different values of the concentration $x$, are generated. The coordination numbers and the radial distribution functions of the structures are in good agreement with the corresponding experimental data. We then calculate the lattice dielectric constants of the materials from quantum mechanical first principles, and the values averaged over an ensemble of samples agree well with the available experimental data, and are very close to the dielectric constants of their cubic form.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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