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arXiv 1202.0647cond-mat.mes-hall
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Si(100)衬底上Au薄膜的变温电镜研究

Temperature-dependent electron microscopy study of Au thin films on Si (100) with and without native oxide layer as barrier at the interface

Ashutosh Rath, J. K. Dash, R. R. Juluri, A Rosenauer, P V Satyam

摘要:

用电子显微镜实时观察了沉积在Si(100)表面的金纳米结构的形貌随退火温度的变化。在金薄膜沉积之前,使用与衬底硅的两种类型的界面:(i)没有原生氧化物并且在超清洁重建的Si表面上,以及(ii)具有原生氧化物覆盖的Si表面。在超高真空条件下,用分子束外延方法在重构Si(100)表面上沉积了\approx 2.0 nm厚的Au薄膜,在相对较低的温度下(与在界面处具有自然氧化物的情况相比)形成了四重对称的纳米金硅化物结构。对于该体系,发现82%的纳米结构是纳米矩形状结构,其平均长度为\approx 27 nm,在\approx 700°C下纵横比为1.13。对于沉积在Si(100)表面上的\approx 5.0 nm厚的Au膜,在较高温度(\approx 850° C)下观察到矩形结构的形成。在这些高温下,硅化金的解吸遵循衬底的对称性。在界面处的原生氧化物被认为是像一个障碍的相互扩散现象。使用先进的电子显微镜方法进行结构表征。

英文摘要:

Real time electron microscopy observation on morphological changes in gold nano structures deposited on Si (100) surfaces as a function of annealing temperatures has been reported. Two types of interfaces with the substrate silicon were used prior to gold thin film deposition: (i) without native oxide and on ultra-clean reconstructed Si surfaces and (ii) with native oxide covered Si surfaces. For a \approx 2.0 nm thick Au films deposited on reconstructed Si(100) surfaces using molecular beam epitaxy method under ultra high vacuum conditions, aligned four-fold symmetric nanogold silicide structures formed at relatively lower temperatures (compared with the one with native oxide at the interface). For this system, 82% of the nanostructures were found to be nano rectangles like structures with an average length \approx 27 nm and aspect ratio of 1.13 at \approx 700°C. For \approx 5.0 nm thick Au films deposited on Si (100) surface with native oxide at the interface, formation of rectangular structures were observed at higher temperatures (\approx 850° C). At these high temperatures, desorption of the gold silicide followed the symmetry of the substrate. Native oxide at the interface was found to act like a barrier for the inter-diffusion phenomena. Structural characterization was carried out using advanced electron microscopy methods.

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