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arXiv 1111.1156math.AP
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静电场MEMS稳态自由边界问题

A stationary free boundary problem modeling electrostatic MEMS

Philippe Laurencot, Christoph Walker

摘要:

研究了静电驱动微机电系统(MEMS)薄膜模型中描述微小变形的自由边界问题。稳定的解决方案的存在性建立了小电压值。广泛研究的窄间隙模型的理由是通过显示稳态解的自由边界问题收敛到固定的解决方案的窄间隙模型时,设备的纵横比趋于零。

英文摘要:

A free boundary problem describing small deformations in a membrane based model of electrostatically actuated MEMS is investigated. The existence of stationary solutions is established for small voltage values. A justification of the widely studied narrow-gap model is given by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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