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arXiv 1107.4874cond-mat.mtrl-sci
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锗基HfO2 / Dy2O3栅叠层MOS器件的介电弛豫和电荷俘获特性研究

Dielectric relaxation and Charge trapping characteristics study in Germanium based MOS devices with HfO2 /Dy2O3 gate stacks

M. Shahinur Rahman, E . K. Evangelou

摘要:

本文研究了生长在Ge衬底上的HfO 2/Dy 2 O3栅叠层的介电弛豫效应和电荷俘获特性。MOS器件在积累时经受恒定电压应力(CVS)条件,并在整个施加应力电压范围内显示出弛豫效应。施加电压的极性以及厚度依赖的弛豫效应进行了研究。电荷俘获在低应力场下可忽略不计,而在较高场(> 4 MV/cm)下变得显著。此外,我们给出的实验证据表明,在串联的介电弛豫效应的另一种机制-所谓的麦克斯韦-瓦格纳不稳定性-是存在的,并影响瞬态电流在应用过程中的CVS脉冲。这种不稳定性也被发现是场依赖性的,从而导致被困的电荷,这是负的,在低应力场,但在较高的领域改变为正。

英文摘要:

In the present work we investigate the dielectric relaxation effects and charge trapping characteristics of HfO2 /Dy2O3 gate stacks grown on Ge substrates. The MOS devices have been subjected to constant voltage stress (CVS) conditions at accumulation and show relaxation effects in the whole range of applied stress voltages. Applied voltage polarities as well as thickness dependence of the relaxation effects have been investigated. Charge trapping is negligible at low stress fields while at higher fields (>4MV/cm) it becomes significant. In addition, we give experimental evidence that in tandem with the dielectric relaxation effect another mechanism- the so-called Maxwell-Wagner instability- is present and affects the transient current during the application of a CVS pulse. This instability is also found to be field dependent thus resulting in a trapped charge which is negative at low stress fields but changes to positive at higher fields.

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