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arXiv 1010.4500cond-mat.mtrl-scicond-mat.mes-hallcond-mat.other
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高分辨率扫描透射电子显微镜的扩展景深

Extended Depth of Field for High Resolution Scanning Transmission Electron Microscopy

Robert Hovden, Huolin L. Xin, David A. Muller

摘要:

像差校正扫描透射电子显微镜(STEM)提供亚埃的横向分辨率;然而,大的会聚角大大降低了景深。对于具有小景深的显微镜,焦平面之外的信息很快变得模糊且不太明确。可能无法完全聚焦成像某些样本。然而,扩展的景深技术允许从聚焦在一定深度范围的一系列图像中提取所有区域都聚焦的单个图像。近年来,各种算法方法已被用于明场光学显微镜。在这里,我们证明了一些已建立的光学显微镜方法也可以应用于扩展100 kV 5阶像差校正STEM(alpha_max = 33 mrad)的~6 nm焦深,以对厚硫化碳载体上的Pt-Co纳米颗粒进行成像。这些技术使我们能够自动获得一个单一的图像,所有的颗粒在焦点以及一个互补的地形图。

英文摘要:

Aberration-corrected scanning transmission electron microscopes (STEM) provide sub-angstrom lateral resolution; however, the large convergence angle greatly reduces the depth of field. For microscopes with a small depth of field, information outside of the focal plane quickly becomes blurred and less defined. It may not be possible to image some samples entirely in focus. Extended depth-of-field techniques, however, allow a single image, with all areas in-focus, to be extracted from a series of images focused at a range of depths. In recent years, a variety of algorithmic approaches have been employed for bright field optical microscopy. Here, we demonstrate that some established optical microscopy methods can also be applied to extend the ~6 nm depth of focus of a 100 kV 5th-order aberration-corrected STEM (alpha_max = 33 mrad) to image Pt-Co nanoparticles on a thick vulcanized carbon support. These techniques allow us to automatically obtain a single image with all the particles in focus as well as a complimentary topography map.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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