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arXiv 1006.0100physics.optics
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紧聚焦飞秒涡旋laser脉冲材料加工

Materials processing with a tightly focused femtosecond vortex laser pulse

Cyril Hnatovsky, Vladlen G. Shvedov, Wieslaw Krolikowski, Andrei V. Rode

摘要:

这封信是第一次使用紧聚焦的飞秒激光涡旋光束进行材料改性的演示。用参考文献[1]中描述的偏振-奇异光束转换器合成双电荷飞秒涡旋,然后使用中等和高数值孔径光学器件(即,NA = 0.45和0.9)烧蚀熔融石英和钠钙玻璃。通过控制脉冲能量,我们可以始终如一地加工出高质量的微米级环形结构,且凹槽厚度均匀小于100 nm。

英文摘要:

This letter is the first demonstration of material modification using tightly focused femtosecond laser vortex beams. Double-charge femtosecond vortices were synthesized with the polarization-singularity beam converter described in Ref [1] and then focused using moderate and high numerical aperture optics (viz., NA = 0.45 and 0.9) to ablate fused silica and soda-lime glasses. By controlling the pulse energy we consistently machine high-quality micron-size ring-shaped structures with less than 100 nm uniform groove thickness.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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