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arXiv 0901.2651cond-mat.mtrl-sci
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靶偏压对偏置靶离子束沉积磁性隧道结特性的影响

Target bias voltage effect on properties of magnetic tunnel junctions by biased target ion beam deposition

Wei Chen, Dao N. H. Nam, Jiwei Lu, Kevin G. West, Stuart A. Wolf

摘要:

采用低能离子源(0-50 eV)和电压偏置靶,通过称为偏置靶离子束沉积(BTIBD)的沉积工具制备了具有AlOx阻挡层的磁性隧道结(MTJ)。BTIBD系统仅在所需靶上直接施加偏置电压,提供足够的溅射能量,避免薄膜沉积过程中的“溢出”污染。AlOx-MTJ的成功沉积证明了BTIBD制造具有良好膜质量的多层结构的能力。MTJ薄膜表面粗糙度和层间混合是导致低TMR性能的关键问题之一。在这里,通过研究偏置电压对MTJ性能的影响,通过测量Neel耦合场和TMR,我们认为,较低的偏置电压减少了混合时发生的顶部CoFe自由层沉积在AlOx势垒,但产生相对较高的表面粗糙度。另一方面,较高的能量沉积增强层间混合和表面平坦化。这种对偏置电压对膜特性的影响的理解可以用于优化MTJ性能。

英文摘要:

Magnetic tunnel junctions (MTJ) with AlOx barrier were fabricated by a deposition tool called Biased Target Ion Beam Deposition (BTIBD) using low energy ion source (0-50 eV) and voltage biased targets. The BTIBD system applies bias voltage directly and only on the desired targets, providing enough sputtering energy and avoiding "overspill" contamination during film deposition. The successful deposition of AlOx-MTJs demonstrated the capability of BTIBD to make multilayer structures with good film quality. MTJ thin film surface roughness and intermixing between layers are among the key problems leading to low TMR performance. Here by studying the bias voltage effect on MTJ properties via the measurement of Neel coupling field and TMR, we suggest that the lower bias voltage reduces the intermixing that occurs when top CoFe free layer is deposited on AlOx barrier, but produces relatively high surface roughness. On the other hand, higher energy deposition enhances both interlayer mixing and surface flattening. Such understanding of bias voltage effects on film properties could be used to optimize the MTJ performances.

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