气溶胶沉积法制备Sr1-xCaxRuO3薄膜
Growth of Sr1-xCaxRuO3 thin films by metalorganic aerosol deposition
摘要：
本文报道了用金属有机气溶胶沉积法在SrTiO_3和MgO衬底上生长Sr_（1-x）Ca_xRuO_3薄膜。用X射线衍射仪和室温扫描隧道显微镜（STM）分别对样品的结构和显微结构进行了表征。STM表明在SrTiO 3上的膜的面内外延和小的表面粗糙度。高品质的薄膜是由高达29的大剩余电阻率比支持。
英文摘要：
We report the growth of thin films of Sr1-xCaxRuO3 on SrTiO3 and MgO substrates by metalorganic aerosol deposition. The structure and microstructure is characterized by X-ray diffraction and room-temperature scanning tunnelling microscopy (STM), respectively. STM indicates in-plane epitaxy and a small surface roughness for films on SrTiO3. The high-quality of the films is supported by large residual resistivity ratios up to 29.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
