A femtosecond laser-written monolithic waveguide laser (WGL) oscillator based on a distributed feedback (DFB) architecture and fabricated in ytterbium doped phosphate glass is reported. The device lased at 1033 nm with an output power of 102 mW and a bandwidth less than 2 pm when bidirectionally pumped at 976 nm. The WGL device was stable and operated for 50 hours without degradation. This demonstration of a high performance WGL opens the possibility for creating a variety of narrow-linewidth laser designs in bulk glasses.
We demonstrate integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67*10^5.
We study analytically the polarization behaviour of directional couplers composed of birefringent waveguides, showing that they can induce polarization transformations that depend on the specific input-output path considered. On the basis of this study, we propose and demonstrate experimentally, by femtosecond laser writing, directional couplers that are free from this problem and also yield a polarization independent power-splitting ratio. More in detail, we devise two different approaches to realize such devices: the first one is based on local birefringence engineering, while the second one…
We report on fabrication of whispering-gallery-mode microlasers in a Nd:glass chip by femtosecond laser three-dimensional (3D) micromachining. Main fabrication procedures include the fabrication of freestanding microdisks supported by thin pillars by femtosecond laser ablation of the glass substrate immersed in water, followed by CO2 laser annealing for surface smoothing. Lasing is observed at a pump threshold as low as ~69 μW at room temperature with a continuous-wave laser diode operating at 780nm. This technique allows for fabrication of microcavities of high quality factors in various diel…
We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly consists of formation of freestanding microdisks by femtosecond laser direct writing and subsequent wet chemical etching. CO2 laser annealing is followed to smooth the microcavity surface. Microcavities with arbitrary tilting angle, lateral and vertical positioning are demonstrated, and the quality (Q)-factor of a typical microcavity is measured to be up to …
We report on fabrication of high Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser microfabrication. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of 2.5x10^5 around 1550 nm wavelength range. Moreover, second harmonic generation with a continuous-wave tunable single-longitudinal-mode pump laser in the on-chip LN microresonator is demonstrated in the on-chip LN microresonator. A fiber taper is employed to couple the pump laser into the microresonator, showing a normalized conversion efficiency of 1.…
We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber taper to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21x10^5 as measured in ai…
Nonlinear optical processes in whispering gallery mode (WGM) microresonators have attracted much attention. Owing to the strong confinement of light in a small volume, a WGM microresonator can dramatically boost the strength of light field, thereby promoting the nonlinear interaction between the light and the resonator material. However, realization of efficient nonlinear parametric process in microresonators is a challenging issue. The major difficulty is to simultaneously ensure the phase matching condition and a coherent multiple resonance condition for all the waves participating in the no…
SNAP microresonators, which are fabricated by nanoscale effective radius variation (ERV) of the optical fiber with sub-angstrom precision, can be potentially used as miniature classical and quantum signal processors, frequency comb generators, as well as ultraprecise microfluidic and environmental optical sensors. Many of these applications require the introduction of nanoscale ERV with a large contrast α which is defined as the maximum shift of the fiber cutoff wavelength introduced per unit length of the fiber axis. The previously developed fabrication methods of SNAP structures, which used …
We report on fabrication of depressed cladding optical waveguides buried in lithium niobate crystal with shaped femtosecond laser pulses. Depressed cladding waveguides of variable mode-field sizes are fabricated by forming the four sides of the cladding using a slit-beam shaping technique. We show that the waveguides fabricated by our technique allows single-mode propagation of the light polarized in both vertical and horizontal directions.
We propose and experimentally demonstrate femtosecond direct laser writing with Bessel beams for the fabrication of photonic crystals with spatial filtering functionality. Such filters are mechanically stable, of small (of order of millimeter) size, do not require direct access to the far-field domain, and therefore are excellent candidates for intracavity spatial filtering applications in mini- and micro-lasers. The technique allows the fabrication of efficient photonic crystal spatial filters in glass, with a narrow angle (~1 degree) nearly 100%-transmission pass-band between broad angle (up…
Hexagonal boron nitride (hBN) is gaining interest for potential applications in integrated quantum nanophotonics. Yet, to establish hBN as an integrated photonic platform several cornerstones must be established, including the integration and coupling of quantum emitters to photonic waveguides. Supported by simulations, we study the approach of monolithic integration, which is expected to have coupling efficiencies that are 4 times higher than those of a conventional hybrid stacking strategy. We then demonstrate the fabrication of such devices from hBN and showcase the successful integration o…
Surface nanoscale axial photonics (SNAP) structures are fabricated with a femtosecond laser for the first time. The inscriptions introduced by the laser pressurize the fiber and cause its nanoscale effective radius variation. We demonstrate the subangstrom precise fabrication of individual and coupled SNAP microresonators having the effective radius variation of several nanometers. Our results pave the way to a novel ultraprecise SNAP fabrication technology based on the femtosecond laser inscription.
Femtosecond laser writing is a powerful technique that allows rapid and cost-effective fabrication of photonic integrated circuits with unique three-dimensional geometries. In particular, the possibility to reconfigure such devices by thermo-optic phase shifters represents a paramount feature, exploited to produce adaptive and programmable circuits. However, the scalability is strongly limited by the flaws of current thermal phase shifters, which require hundreds of milliwatts to operate and exhibit large thermal crosstalk. In this work, thermally-insulating three-dimensional microstructures a…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for fabricating these devices often lack flexibility. While photolithography requires printing of an expensive photomask for each new design iteration, electron-beam lithography is extremely slow and commands high equipment cost. Here we demonstrate maskless rapid prototyping of freestanding SiN nanomechanical resonators fabricated by femtosecond laser ablation of …
We report the fabrication and performance of the first C-band directly-written monolithic waveguide-laser. The waveguide-laser device was created in an Erbium and Ytterbium doped phosphate glass host and consisted of an optical waveguide that included a distributed feedback Bragg grating structure. The femtosecond laser direct-write technique was used to create both the waveguide and the waveguide-Bragg grating simultaneously and in a single processing step. The waveguide-laser was optically pumped at approximately 980 nm and lased at 1537nm with a bandwidth of less than 4 pm.
We report on fabrication of tubular optical waveguides buried in ZBLAN glass based on transverse femtosecond laser direct writing. Irradiation in ZBLAN with focused femtosecond laser pulses leads to decrease of refractive index in the modified region. Tubular optical waveguides of variable mode areas are fabricated by forming the four sides of the cladding with slit-shaped femtosecond laser pulses, ensuring single mode waveguiding with a mode field dimension as small as ~ 4 μm.
Real-time spectroscopic monitoring of continuous synthesis of zinc oxide nanostructures in femtosecond laser fabricated 3D microfluidic microchannels with integrated on-chip fiber probe array
We present a rotated polarization directional coupler (RPDC) on a photonic chip. We demonstrate a double-track approach to modify the distribution of refractive index between adjacent tracks and form a single waveguide with arbitrary birefringent optical axis. We construct a RPDC with the two axis-rotated waveguides coupled in a strong regime. The obtained extinction ratios on average are about 16dB and 20dB for the corresponding orthogonal polarizations. We perform the reconstruction of Stokes vector to test the projection performance of our RPDC, and observe the average fidelities up to 98.1…
A monolithically integrated mode-locked semiconductor laser is proposed. The compound ring cavity is composed of a colliding pulse mode-locking (ML) subcavity and a passive Fabry-Perot feedback subcavity. These two 1.6 mm long subcavities are coupled by using on-chip reflectors at both ends, enabling harmonic mode locking. By changing DC-bias conditions, optical mode spacing from 50 to 450 GHz is experimentally demonstrated. Ultrafast pulses shorter than 0.3 ps emitted from this laser diode are shown in autocorrelation traces.
We demonstrate a robust low-loss optical interface by tiling passive (i.e., without doping of active ions) thin film lithium niobate (TFLN) and active (i.e., doped with rare earth ions) TFLN substrates for monolithic integration of passive/active lithium niobate photonics. The tiled substrates composed of both active and passive areas allow to pattern the mask of the integrated active passive photonic device at once using a single continuous photolithography process. The interface loss of tiled substrate is measured as low as 0.26 dB. Thanks to the stability provided by this approach, a four-c…
Using femtosecond laser machining, we have fabricated photonic bandgap materials that influence propagation of phonon-polaritons in ferroelectric crystals. Broadband polaritons were generated with impulsive stimulated Raman scattering (ISRS) using an ultrashort laser pulse, and the spatial and temporal evolution of the polaritons were imaged as they propagated through the fabricated structures with polariton real-space imaging. These techniques offer a new approach to optical materials design.
We designed, fabricated and characterized a flat multi-level diffractive lens (MDL) comprised of only silicon with diameter = 15.2mm, focal length of 19mm, and operating over the longwave infrared (LWIR) spectrum of 8um to 14um. We experimentally demonstrated field of view of 46deg, depth of focus >7mm and wavelength-averaged Strehl ratio of 0.46. All these metrics were comparable to those of a conventional refractive lens. The active device thickness is only 8um and its weight (including the silicon substrate) is less than 0.2g.
Diamond has attracted great interest as a quantum technology platform thanks to its optically active nitrogen vacancy center (NV). The NV's ground state spin can be read out optically exhibiting long spin coherence times of about 1 ms even at ambient temperatures. In addition, the energy levels of the NV are sensitive to external fields. These properties make NVs attractive as a scalable platform for efficient nanoscale resolution sensing based on electron spins and for quantum information systems. Diamond photonics enhances optical interaction with NVs, beneficial for both quantum sensing and…
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates formation of on-chip microresonators on various kinds of bulk crystalline material…
We demonstrate monolithic integration of an electro-optically (EO) tunable microring laser on lithium niobate on insulator (LNOI) platform. The device is fabricated by photolithography assisted chemo-mechanical etching (PLACE), and the pump laser is evanescently coupled into the erbium (Er3+) doped LN microring laser using an undoped LN waveguide mounted above the microring. The quality factor of the LN microring resonator is measured as high as 1.54x10^5 at the wavelength of 1542 nm. Lasing action can be observed at a pump power threshold below 3.5 mW using a 980 nm continuous-wave pump laser…
We have demonstrated for the first time that an array of nanoantennas (central nanotips inside sub-micron pits) on an aluminum surface, fabricated using a specific double-pulse femtosecond laser irradiation scheme, results in a 28-fold enhancement of the non-linear (three-photon) electron photoemission yield, driven by a third intense IR femtosecond laser pulse. The supporting numerical electrodynamic modeling indicates that the electron emission is increased not owing to a larger effective aluminum surface, but due to instant local electromagnetic field enhancement near the nanoantenna, contr…
We demonstrate the generation and demultiplexing of quantum correlated photons on a monolithic photonic chip composed of silicon and silica-based waveguides. Photon pairs generated in a nonlinear silicon waveguide are successfully separated into two optical channels of an arrayed-waveguide grating fabricated on a silica-based waveguide platform.
Zero-index materials exhibit exotic optical properties that can be utilized for integrated-optics applications. However, practical implementation requires compatibility with complementary metallic-oxide-semiconductor (CMOS) technologies. We demonstrate a CMOS-compatible zero-index metamaterial consisting of a square array of air holes in a 220-nm-thick silicon-on-insulator (SOI) wafer. This design is achieved through a Dirac-cone dispersion. The metamaterial is entirely composed of silicon and offers compatibility through low-aspect-ratio structures that can be simply fabricated in a standard …
We report on an optical frequency comb with 14nm (~1.8 THz) spectral bandwidth at -3 dB level that is generated using a passively mode-locked quantum-well (QW) laser in photonic integrated circuits (PICs) fabricated through an InP generic photonic integration technology platform. This 21.5-GHz colliding-pulse mode-locked laser cavity is defined by on-chip reflectors incorporating intracavity phase modulators followed by an extra-cavity SOA as booster amplifier. A 1.8-THz-wide optical comb spectrum is presented with ultrafast pulse that is 0.35-ps-wide. The radio frequency beat note has a 3-dB …
We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulate (LNOI), which is achieved by femtosecond laser assisted chemo-mechanical polish. We demonstrate a high extinction ratio beam splitter, a 1 * 6 optical switch, and a balanced 3 * 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.
We demonstrate fabrication of a high quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-um-diameter disks with a 200-nm-gap are fabricated. With our device, an optical quality factor as high as 1.2*10^5 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.
We reported on the generation of femtosecond pulse in an anomalous-dispersion fiber ring laser by using a polyvinyl alcohol (PVA)-based Topological Insulator (TI), Bi2Se3 saturable absorber (SA). The PVA-TI composite has a low saturable optical intensity of 12 MW/cm2 and a modulation depth of ~3.9%. By incorporating the fabricated PVA-TISA into a fiber laser, mode-locking operation could be achieved at a low pump threshold of 25 mW. After an optimization of the cavity parameters, optical pulse with ~660 fs centered at 1557.5 nm wavelength had been generated. The experimental results demonstrat…
We demonstrate that thousands of periodic nano-craters are fabricated on a subwavelength-diameter tapered optical fiber, an optical nanofiber, by irradiating with just a single femtosecond laser pulse. A key aspect of the fabrication is that the nanofiber itself acts as a cylindrical lens and focuses the femtosecond laser beam on its shadow surface. We also demonstrate that such periodic structures on the nanofiber, act as a 1-D photonic crystal (PhC). Such PhC structures on the nanofiber will strongly enhance the field confinement in such a tapered fiber-based system and may open new avenues …
We demonstrate a monolithically integrable heralded photon source in a femtosecond laser direct written glass waveguide. The generation of photon pairs with a wide wavelength separation requires a concomitant large birefringence in the normal dispersion regime. Here, by incorporation of side-stress tracks, we produce a waveguide with a birefringence of $1.64\times~10^{-4}$ and propagation loss as low as 0.21 dB/cm near 980~nm. We measure photon pairs with 300~nm wavelength separation at an internal generation rate exceeding $5.05\times10^6$/s. The second order correlations indicate that the ge…
This work represents a particular application of waveguide fabricated by femtosecond laser micromachining technology. More specifically, we report the development of an optical modulator based on the fabrication of single-mode optical waveguide structures buried in X-cut lithium niobate crystal with the femtosecond laser direct writing method. Here, change in refractive index profile is measured using near field intensity profile measurement method at optimized writing conditions. It has been observed that the change refractive index (Δn) is in the range of 10-4. Finally, the behavior of femto…
We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First two metallic microelectrodes on the substrate were formed via femtosecond laser process. Then a high-Q lithium niobate microresonator located between the microelectrodes was fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Due to the efficient structure designing, high electro-optical tuning coefficient of 3.41 pm/V was observed.
Formation dynamics of the nanojets and nanocrowns induced on the surface of the Cu supported films of different thickness under the impact of tightly focused femtosecond pulses was studied in detail. We show that the single-shot fs-pulse irradiation of the 120-nm-thick Cu film results in formation of a single nanojet, which splits at increased pulse energy into two and then into a plurality of periodically arranged nanospikes eventually acquiring the form of the so-called nanocrown. The number of nanospike in the nanocrown was found to be linearly dependent on the pulse energy and nanocrown ra…
Fabrication of large area (sub 1 cm cross-section) micro-optical components in a short period of time (approximately 10 min) and with lesser number of processing steps is highly desirable and cost-effective. In the recent years, femtosecond laser fabrication technology has revolutionized the field of manufacturing by offering the above capabilities. In this study, a fundamental diffractive optical element, binary axicon i.e axicon with two phase or amplitude levels, has been designed in three configurations namely conventional axicon, photon sieve axicon (PSA) and sparse PSA and directly mille…
We have demonstrated the fabrication and characterization of 2D liquid-based multimode optical waveguide structures over a Polydimethylsiloxane (PDMS) material-based chip. Fabrication of two separate microstructures, one with a width of 14 microns and a depth of 27 microns while the other with a width as well as depth of 110 microns, was achieved by the femtosecond laser micromachining process. The dye solution is passed through the microstructure from one end to the other; wherein the dye solution acts as the core while PDMS and air act as the cladding medium. The femtosecond laser micromachi…
Photonic integration on plastic substrates enables emerging applications ranging from flexible interconnects to conformal sensors on biological tissues. Such devices are traditionally fabricated using pattern transfer, which is complicated and has limited integration capacity. Here we pioneered a monolithic approach to realize flexible, high-index-contrast glass photonics with significantly improved processing throughput and yield. Noting that the conventional multilayer bending theory fails when laminates have large elastic mismatch, we derived a mechanics theory accounting for multiple neutr…
We report fabrication of low loss single mode waveguides on lithium niobate on insulator (LNOI) cladded by a layer of SiO2. Our technique, termed photolithography assisted chemo-mechanical etching (PLACE), relies on patterning of a chromium film into the mask shape by femtosecond laser micromachining and subsequent chemo-mechanical etching of the lithium niobate thin film. The high-index-contrast single mode waveguide is measured to have a propagation loss of 0.13 dB/cm. Furthermore, waveguide tapers are fabricated for boosting the coupling efficiency.
Low loss, optical channel waveguides have been successfully produced by high repetition rate, femtosecond laser inscription in a Li-Zn fluoroborate glass (64.9B2O3 + 25Li2O + 10ZnF2 + 0.1Er2O3). High quality waveguides were produced at 500 kHz, 1 MHz and 2 MHz laser repetition rates, showing a refractive index contrast in the range of 3-6 x 10-3 depending on various fluences. Dependence of experimental parameters such as average laser power, pulse repetition rate and writing speed on the properties of fabricated waveguides has been discussed. The comparison of optical and compositional charact…
The importance of integrated quantum photonics in the telecom band resides on the possibility of interfacing with the optical network infrastructure developed for classical communications. In this framework, femtosecond laser written integrated photonic circuits, already assessed for quantum information experiments in the 800 nm wavelength range, have great potentials. In fact these circuits, written in glass, can be perfectly mode-matched at telecom wavelength to the in/out coupling fibers, which is a key requirement for a low-loss processing node in future quantum optical networks. In additi…
We report on the fabrication of micro-axicons made of glass by laser-assisted wet etching (LAE) and laser polishing. The employed technique, relying on an efficient direct-writing process by femtosecond laser, allows revealing high fidelity profiles while etched in a heated potassium hydroxide (KOH) solution. The remaining surface roughness is then smoothened by carbon dioxide (CO2) laser polishing. Such polishing is limited to the skin of the component so that the tip is only slightly rounded, with a radius of curvature of nearly 200 μm. It is then shown with 500 μm-diameter axicons that the …
