高重复频率飞秒laser辐照在Li-Zn氟硼酸盐玻璃中写入光通道波导
Optical channel waveguides written by high repetition rate femtosecond laser irradiation in Li-Zn fluoroborate glass
摘要：
采用高重复频率飞秒激光刻蚀技术在Li-Zn氟硼酸盐玻璃（64.9B_2O_3 + 25Li_2O +10ZnF_2 + 0.1Er_2O_3）中成功制备了低损耗光通道波导。在500 kHz、1 MHz和2 MHz激光重复频率下生产出高质量的波导，根据不同的能量密度，折射率对比度在3-6 x 10-3的范围内。讨论了平均激光功率、脉冲重复频率和写入速度等实验参数对波导性能的影响。光学和成分表征技术的比较证明了在引导区域中B和Zn的富集，而F迁移到写入结构的热扩散区域。
英文摘要：
Low loss, optical channel waveguides have been successfully produced by high repetition rate, femtosecond laser inscription in a Li-Zn fluoroborate glass (64.9B2O3 + 25Li2O + 10ZnF2 + 0.1Er2O3). High quality waveguides were produced at 500 kHz, 1 MHz and 2 MHz laser repetition rates, showing a refractive index contrast in the range of 3-6 x 10-3 depending on various fluences. Dependence of experimental parameters such as average laser power, pulse repetition rate and writing speed on the properties of fabricated waveguides has been discussed. The comparison of optical and compositional characterization techniques evidences an enrichment of B and Zn in the guiding region, while F migrates to the heat diffused region of the written structure.
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