arXivDaily arXiv每日学术速递 周一至周五更新
arXiv周末暂无论文更新,休息一下吧,周末愉快~~
arXiv 0804.3374physics.optics
收藏

Coupled-Resonator Optical Near-Field Lithography

Mankei Tsang, Demetri Psaltis

英文摘要:

The problem of pattern formation in resonantly-enhanced near-field lithography by the use of dielectric or plasmonic planar resonators is investigated. Sub-diffraction-limited bright or dark spots can be produced by taking advantage of the rotational invariance of planar resonators. To increase the spatial bandwidth of the resonant enhancement, an array of coupled planar resonators can open up a band of Bloch resonances, analogous to coupled-resonator optical waveguides.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑