arXiv 1102.23702011-02-11physics.optics

具有垂直耦合集成总线波导的单片回音壁模式谐振器

Monolithic whispering-gallery mode resonators with vertically coupled integrated bus waveguides

Mher Ghulinyan, Romain Guider, Georg Pucker, Lorenzo Pavesi

备注：: 3 pages, 3 figures
发表信息：: IEEE Photon. Technol. Lett. 23, 1166-1168 (2011)
DOI：: 10.1109/LPT.2011.2157487

摘要：

我们报告的实现和光学特性的CMOS兼容的硅基微谐振器/波导耦合系统，完全集成在硅芯片上。该器件在谐振器和掩埋条形波导之间采用垂直耦合方案。我们证明了它的高光学质量来自波导拓扑的精确平坦化。更重要的是，我们展示了一个晶圆级的大规模制造的独立平面谐振器悬浮在空气中，并耦合到集成总线波导。耦合距离的纳米控制允许谐振器的不同模式族的精确和选择性激发。这为实现用于光学机械和MEMS应用的稳定的全集成复合谐振器系统打开了大门，具有替代目前密集使用的复杂光纤锥形耦合方案的潜力。

英文摘要：

We report on the realization and optical characterization of a CMOS-compatible silicon-based microresonator/waveguide coupled system, fully integrated on a silicon chip. The device uses a vertical coupling scheme between the resonator and a buried strip waveguide. We demonstrate that its high optical quality follows from the accurate planarization of the waveguide topography. More importantly, we demonstrate a wafer-scale mass fabrication of freestanding planar resonators suspended in air and coupled to the integrated bus waveguides. A nanometer control of the coupling distances allows for a precise and selective excitation of different mode families of the resonator. This opens the door for the realization of stable all-integrated complex resonator systems for optomechanical and metrological applications, with the potential to substitute the nowadays intensive use of complicated fiber-taper coupling schemes.

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