arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 0802.3502cond-mat.mtrl-sci
收藏

杂质原子间隙迁移方程的解析解

Analytical solution of the equations describing interstitial migration of impurity atoms

O. I. Velichko, N. A. Sobolevskaya

摘要:

对于半导体表面Robin边界条件,得到了描述非平衡杂质间隙原子迁移引起的杂质扩散方程的解析解.所得到的解决方案可以是有用的近似数值解的验证,为模拟的一些过程中的间隙扩散,并为模拟杂质扩散在掺杂层与decananometer的厚度,因为在这些层之间的不动的替代溶解的杂质原子,迁移self-promptials,迁移间隙杂质原子的不平衡可以发生。为了说明后者的情况下,氮在砷化镓中的扩散模型的开发和模拟的氮再分布从掺杂外延层在GaAs衬底的热退火过程中完成。计算的杂质浓度分布与实验数据吻合得很好。拟合的实验配置文件,使我们能够推导出的值的参数,描述间隙杂质扩散。

英文摘要:

An analytical solution of the equations describing impurity diffusion due to the migration of nonequilibrium impurity interstitial atoms was obtained for the case of the Robin boundary condition on the surface of a semiconductor. The solution obtained can be useful for verification of approximate numerical solutions, for simulation of a number of processes of interstitial diffusion, and for modeling impurity diffusion in doped layers with the decananometer thickness because in these layers a disequilibrium between immobile substitutionally dissolved impurity atoms, migrating self-interstitials, and migrating interstitial impurity atoms can take place. To illustrate the latter cases, a model of nitrogen diffusion in gallium arsenide was developed and simulation of nitrogen redistribution from a doped epi-layer during thermal annealing of GaAs substrate was done. The calculated impurity concentration profile agrees well with experimental data. The fitting to the experimental profiles allowed us to derive the values of the parameters that describe interstitial impurity diffusion.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑