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arXiv 1506.03314cond-mat.mtrl-sci
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砷在硅中的间隙扩散

Interstitial diffusion of arsenic in silicon

O. I. Velichko

摘要:

利用非平衡杂质间隙种的长程间隙迁移机制模拟了离子注入过程中砷的再分布。一个很好的协议的计算砷浓度分布与实验数据允许一个假设,非平衡砷间隙原子的迁移,使热砷扩散的低浓度区域的形成作出了重大贡献。在此假设的框架内计算的砷浓度分布的温度为1050摄氏度与实验一致。已经获得了描述在1050和1108摄氏度下砷扩散的一些参数。

英文摘要:

The mechanism underlying the long-range interstitial migration of nonequilibrium impurity interstitial species is used to simulate arsenic redistribution in ion implantation. An excellent agreement of the calculated arsenic concentration profiles with experimental data allows one to assume that the migration of nonequilibrium arsenic interstitial atoms makes a significant contribution to the formation of a low concentration region on thermal arsenic diffusion. The arsenic concentration profile calculated for a temperature of 1050 Celsius degrees within the framework of this assumption agrees well with the experimental one. A number of parameters describing arsenic diffusion at 1050 and 1108 Celsius degrees have been obtained.

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