原子力显微镜光刻制备MgB2射频超导量子干涉器件
MgB2 radio-frequency superconducting quantum interference device prepared by atomic force microscope lithography
摘要:
提出了一种在MgB_2薄膜上制备射频超导量子干涉器件的新方法。可变厚度的桥梁,准备通过组合的光学光刻和划痕的原子力显微镜。在4.2K时,纳米桥的临界电流为0.35 μ A。在我们的结构上研究了电流相位特性和临界电流与温度的非接触测量。
英文摘要:
A new method of preparation of radio-frequency superconducting quantum interference devices on MgB2 thin films is presented. The variable-thickness bridge was prepared by a combination of optical lithography and of the scratching by an atomic force microscope. The critical current of the nanobridge was 0.35 uA at 4.2 K. Non-contact measurements of the current-phase characteristics and of the critical current vs. temperature have been investigated on our structures.
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