A technique is demonstrated which efficiently transfers light between a tapered standard single-mode optical fiber and a high-Q, ultra-small mode volume, silicon photonic crystal resonant cavity. Cavity mode quality factors of 47000 are measured, and a total fiber-to-cavity coupling efficiency of 44% is demonstrated. Using this efficient cavity input and output channel, the steady-state nonlinear absorption and dispersion of the photonic crystal cavity is studied. Optical bistability is observed for fiber input powers as low as 250 μW, corresponding to a dropped power of 100 μW and 3 fJ of stored cavity energy. A high-density effective free-carrier lifetime for these silicon photonic crystal resonators of 0.5 ns is also estimated from power dependent loss and dispersion measurements.
We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber taper to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21x10^5 as measured in ai…
We demonstrate a new method for creation of surface nanoscale axial photonics (SNAP) microresonators with harmonic profiles via fiber tapering in a laser-heated microfurnace. The simple procedure makes microresonators that support hundreds of axial modes with good spacing uniformity, yielding a promising prospective method for fabricating miniature frequency comb generators and dispersionless delay lines.
In general, a high-Q microresonator can accommodate abundant whispering gallery modes (WGMs) with the mode number increasing with the dimensional sizes of the microresonator. Removing the unnecessary modes while reorganizing the remaining modes is of vital importance, which, however, has been proved challenging and usually results in a tradeoff with the Q of the microresonator. Here, we reveal an effective and controllable mode trimming and clustering mechanism underlying the generation of polygon and star modes in weakly perturbed tapered fiber-coupled lithium niobate whispering gallery micro…
We experimentally realize a Fabry-Perot-type optical microresonator near the cesium D2 line wavelength based on a tapered optical fiber, equipped with two fiber Bragg gratings which enclose a sub-wavelength diameter waist. Owing to the very low taper losses, the finesse of the resonator reaches F = 86 while the on-resonance transmission is T = 11 %. The characteristics of our resonator fulfill the requirements of non-linear optics and cavity quantum electrodynamics in the strong coupling regime. In combination with its demonstrated ease of use and its advantageous mode geometry, it thus opens …
Optical fiber tapers are used to collect photoluminescence emission at ~1.5 um from photonic crystal cavities fabricated in erbium doped silicon nitride on silicon. Photoluminescence collection via fiber taper is enhanced 2.5 times relative to free space, with a total taper collection efficiency of 53%. By varying the fiber taper offset from the cavity, a broad tuning range of coupling strength is obtained. This material system combined with fiber taper collection is promising for building on-chip optical amplifiers.
We observe high optical quality factor (Q) polygonal and star coherent optical modes in a lithium niobate microdisk. In contrast to the previous polygon modes achieved by deformed microcavities at lower mechanical and optical Q, we adopted weak perturbation from a tapered fiber for the polygon mode formation. The resulting high intracavity optical power of the polygon modes triggers second harmonic generation at high efficiency. With the combined advantage of high mechanical Q cavity optomechanical oscillation was observed for the first time. Finally, we observe frequency microcomb generation …
We observe a transition to a coherent-comb state in a SiN-microresonator with anomalous dispersion. Although ~300 fs pulse trains are generated after line-by-line shaping, the intensity within the microring does not appear to be pulse-like.
We investigate soliton generation dynamics with the influence of thermal effects. Either soliton annihilation or survival can occur in different trials with the same tuning method, and a spontaneous route to soliton formation is observed.
We propose and demonstrate a convenient and sensitive technique for precise engineering of group-velocity dispersion in high-Q silicon microresonators. By accurately controlling the surface-oxidation thickness of silicon microdisk resonators, we are able to precisely manage the zero-dispersion wavelength while simultaneously further improving the high optical quality of our devices, with the optical Q close to a million. The demonstrated dispersion management allows us to achieve parametric generation with precisely engineerable emission wavelengths, which shows great potential for application…
We demonstrate the first low-noise mid-IR frequency comb source using a silicon microresonator. Our observation of strong Raman scattering lines in the generated comb suggests that Raman and four-wave mixing interactions play a role in assisting the transition to the low-noise state. In addition, we characterize, the intracavity comb generation dynamics using an integrated PIN diode, which takes advantage of the inherent three-photon absorption process in silicon.
Integrated optics has distinct advantages for applications in space because it integrates many elements onto a monolithic, robust chip. As the development of different building blocks for integrated optics advances, it is of interest to answer the important question of their resistance with respect to ionizing radiation. Here we investigate effects of proton radiation on high-Q silicon nitride microresonators formed by a waveguide ring. We show that the irradiation with high-energy protons has no lasting effect on the linear optical losses of the microresonators.
We demonstrate an ultra-compact waveguide taper in Silicon Nitride platform. The proposed taper provides a coupling-efficiency of 95% at a length of 19.5 um in comparison to the standard linear taper of length 50 um that connects a 10 um wide waveguide to a 1 um wide photonic wire. The taper has a spectral response > 75% spanning over 800 nm and resilience to fabrication variations; >200 nm change in taper and end waveguide width varies transmission by <5%. We experimentally demonstrate taper insertion loss of <0.1 dB/transition for a taper as short as 19.5 um, and reduces the footprint of the…
We demonstrate the generation of counter-rotating cavity solitons in a silicon nitride microresonator using a fixed, single-frequency laser. We demonstrate a dual 3-soliton state with a difference in the repetition rates of the soliton trains that can be tuned by varying the ratio of pump powers in the two directions. Such a system enables a highly compact, tunable dual comb source that can be used for applications such as spectroscopy and distance ranging.
Mid-infrared (mid-IR) frequency combs have broad applications in molecular spectroscopy and chemical/biological sensing. Recently developed microresonator-based combs in this wavelength regime could enable portable and robust devices using a single-frequency pump field. Here, we report the first demonstration of a modelocked microresonator-based frequency comb in the mid-IR spanning 2.4 μm to 4.3 μm. We observe high pump-to-comb conversion efficiency, in which 40% of the pump power is converted to the output comb power. Utilizing an integrated PIN structure allows for tuning the silicon micror…
We report on fabrication of high Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser microfabrication. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of 2.5x10^5 around 1550 nm wavelength range. Moreover, second harmonic generation with a continuous-wave tunable single-longitudinal-mode pump laser in the on-chip LN microresonator is demonstrated in the on-chip LN microresonator. A fiber taper is employed to couple the pump laser into the microresonator, showing a normalized conversion efficiency of 1.…
We experimentally demonstrate a broadband, fabrication tolerant, CMOS compatible compact silicon waveguide taper (34.2 um) in silicon-on-insulator wire waveguides. The taper works on multi-mode interference along the length of the taper. A single taper design has a broadband operation with coupling efficiency >70% over 700 nm that can be used in O, C and L-band. The compact taper is highly tolerant to fabrication variations; >100 nm change in the taper and end waveguide width varies the taper transmission by <5%. The footprint of the device i.e. taper along with the linear gratings is ~ 442 m2…
A novel design of large bandwidth, fabrication tolerant, CMOS-compatible compact tapers (15 um) have been proposed and experimentally demonstrated in silicon-on-insulator. The proposed taper along with linear grating couplers for spot-size conversion exhibits no degradation in the coupling efficiency compared to a standard focusing grating in 1550 nm band. A single taper design has a broadband operation over 600 nm that can be used in O, C and L-band. The proposed compact taper is highly tolerant to fabrication variations; 80 nm change in the taper width and 200 nm in end waveguide width varie…
Kerr frequency combs generated from microresonators are the subject of intense study. Most research employs microresonators with anomalous dispersion, for which modulation instability is believed to play a key role in initiation of the comb. Comb generation in normal dispersion microresonators has also been reported but is less well understood. Here we report a detailed investigation of few-moded, normal dispersion silicon nitride microresonators, showing that mode coupling can strongly modify the local dispersion, even changing its sign. We demonstrate a link between mode coupling and initiat…
Superconducting optoelectronic networks could achieve scales unmatched in hardware-based neuromorphic computing. After summarizing recent progress in this area, we report new results in cryogenic silicon photonic light sources, components central to these architectures.
We demonstrate photonic devices based on standard 3C SiC epitaxially grown on silicon. We achieve high optical confinement by taking advantage of the high stiffness of SiC and undercutting the underlying silicon substrate. We demonstrate a 20 um radius suspended microring resonator with Q of 18000 fabricated on commercially available SiC-on-silicon substrates.
Silicon carbide (SiC) exhibits excellent material properties attractive for broad applications. We demonstrate the first SiC optomechanical microresonators that integrate high mechanical frequency, high mechanical quality, and high optical quality into a single device. The radial-breathing mechanical mode has a mechanical frequency up to 1.69 GHz with a mechanical Q around 5500 in atmosphere, which corresponds to a mechanical f-Q product as high as 9.47x10^12 Hz. The strong optomechanical coupling allows us to efficiently excite and probe the coherent mechanical oscillation by optical waves. T…
We report Raman lasing and the optical analog of electromagnetically-induced-transparency (EIT) in a whispering-gallerymode (WGM) microtoroid resonator embedded in a low refractive index polymer matrix together with a tapered fiber coupler. The Raman laser supports both single and multimode operation with low power thresholds. Observations of Fano and EIT-like pheonomena in a packaged microresonator will enable high resolution sensors and can be used in networks where slow light process is needed. These results open the way for portable, robust, and stable WGM microlasers and laserbased sensor…
Thermodynamic noise places a fundamental limit on the frequency stability of dielectric optical resonators. Here, we present the characterization of thermo-refractive noise in photonic-chip-based silicon nitride microresonators and show that thermo-refractive noise is the dominant thermal noise source in the platform. We employed balanced homodyne detection to measure the thermo-refractive noise spectrum of microresonators of different diameters. The measurements are in good agreement with theoretical models and finite element method simulations. Our characterization sets quantitative bounds o…
The realization of ultrahigh quality (Q) resonators regardless of the underpinning material platforms has been a ceaseless pursuit, because the high Q resonators provide an extreme environment of storage of light to enable observations of many unconventional nonlinear optical phenomenon with high efficiencies. Here, we demonstrate an ultra-high Q factor (7.1*10^6) microresonator on the 4H-silicon-carbide-on-insulator (4H-SiCOI) platform in which both \c{hi}^(2) and \c{hi}^(3) nonlinear processes of high efficiencies have been generated. Broadband frequency conversions, including second-, third…
Microresonator frequency combs, or microcombs, have gained wide appeal for their rich nonlinear physics and wide range of applications. Stoichiometric silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD), in particular, are widely used in chip-integrated Kerr microcombs. Critical to such devices is the ability to control the microresonator dispersion, which has contributions from both material refractive index dispersion and geometric confinement. Here, we show that modifications to the LPCVD growth conditions, specifically the ratio of the gaseous precursors, has a s…
Silicon nitride (Si$_3$N$_4$) is an ever-maturing integrated platform for nonlinear optics. Yet, due to the absence of second-order ($χ^{(2)}$) nonlinearity, Si$_3$N$_4$ is mostly considered for third-order ($χ^{(3)}$) nonlinear interactions. Recently, this limitation was overcome by optical poling in both Si$_3$N$_4$ waveguides and microresonators via the photogalvanic effect, resulting in the inscription of quasi-phase-matched $χ^{(2)}$ gratings. Here, we report cascaded nonlinear effects in a normal dispersion Si$_3$N$_4$ microresonator with combined $χ^{(2)}$ and $χ^{(3)}$ nonlinearities. …
Bringing efficient second-order nonlinear effects in integrated photonics is an important task motivated by the prospect of enabling all possible optical functionalities on chip. Such task has proved particularly challenging in silicon photonics, as materials best suited for photonic integration lack second-order susceptibility ($χ^{(2)}$). Methods for inducing effective $χ^{(2)}$ in such materials have recently opened new opportunities. Here, we present optically reconfigurable quasi-phase-matching in large radius Si$_3$N$_4$ microresonators resulting in mW level on-chip second-harmonic gener…
We report the first demonstration of integrated electro-optic (EO) phase shifters based on racetrack microresonators on a 3C-silicon-carbide-on-insulator (SiCOI) platform working at near-infrared (NIR) wavelengths. By applying DC voltage in the crystalline axis perpendicular to the waveguide plane, we have observed optical phase shifts from the racetrack microresonators whose loaded quality (Q) factors are ~ 30,000. We show voltage length-product (V$π$${\cdot}$L$π$) of 118 V${\cdot}$cm, which corresponds to an EO coefficient r$_{41}$ of 2.6 pm/V. The SiCOI platform can be used to realize tunab…
We study the generation of parabolic self-similar optical pulses in tapered Si photonic nanowires (Si-PhNWs) both at telecom (λ=1.55 μm) and mid-IR (λ=2.2 μm) wavelengths. Our computational study is based on a rigorous theoretical model, which fully describes the influence of linear and nonlinear optical effects on pulse propagation in Si-PhNWs with arbitrarily varying width. Numerical simulations demonstrate that, in the normal dispersion regime, optical pulses evolve naturally into parabolic pulses upon propagating in millimeter-long tapered Si-PhNWs, with the efficiency of this pulse reshap…
Tapered and dispersion managed (DM) silicon nanophotonic waveguides are investigated for the generation of optimal ultra broadband supercontinuum (SC). DM waveguides are structures showing a longitudinally dependent group velocity dispersion that results from the variation of the waveguide width with the propagation distance. For the generation of optimal SC, a genetic algorithm has been used to find the best dispersion map. This allows for the generation of highly coherent supercontinuums that span over 1.14 octaves from 1300 nm to 2860 nm and 1.25 octaves from 1200 nm to 2870 nm at -20 dB le…
We demonstrate fully crystalline, single-mode ultrahigh quality factor integrated microresonators comprising epitaxially grown Si$_{0.86}$Ge$_{0.14}$ waveguide cores with silicon claddings. These waveguides support resonances with internal $Q >10^8$ for both polarization modes, a nearly order-of-magnitude improvement over that seen in prior integrated Si photonics platforms. The maximum $Q$ is $1.71\pm0.06 \times 10^8$ for the transverse magnetic (TM) polarization mode, corresponding to a loss of $0.39\pm0.02$ dB/m. Together with silicon's strong Kerr nonlinearity and low losses in the optical…
We propose a system of coupled microring resonators for the generation frequency combs and dissipative Kerr solitons in silicon at telecommunication frequencies. By taking advantage of structural slow-light, the effective non-linearity of the material is enhanced, thus relaxing the requirement of ultra-high quality factors that currently poses a major obstacle to the realization of silicon comb devices. We demonstrate a variety of frequency comb solutions characterized by threshold power in the 10-milliwatt range and a small footprint of $0.1$ mm$^2$, and study their robustness to structural d…
The repetition rate of a Kerr comb comprising a single soliton in an anomalous dispersion silicon nitride microcavity is measured as a function of pump frequency tuning. The contributions from the Raman soliton self-frequency shift (SSFS) and from thermal effects are evaluated both experimentally and theoretically; the SSFS is found to dominate the changes in repetition rate. The relationship between the changes in repetition rate and pump frequency detuning is found to be independent of the nonlinearity coefficient and dispersion of the cavity. Modeling of the repetition rate change by using …
Optical parametric oscillation (OPO) is distinguished by its wavelength access, that is, the ability to flexibly generate coherent light at wavelengths that are dramatically different from the pump laser, and in principle bounded solely by energy conservation between the input pump field and the output signal/idler fields. As society adopts advanced tools in quantum information science, metrology, and sensing, microchip OPO may provide an important path for accessing relevant wavelengths. However, a practical source of coherent light should additionally have high conversion efficiency and high…
Kerr frequency comb generation relies on dedicated waveguide platforms that are optimized towards ultralow loss while offering comparatively limited functionality restricted to passive building blocks. In contrast to that, the silicon-photonic platform offers a highly developed portfolio of high-performance devices, but is deemed to be inherently unsuited for Kerr comb generation at near-infrared (NIR) telecommunication wavelengths due to strong two-photon absorption (TPA) and subsequent free-carrier absorption (FCA). Here we present a theoretical investigation that quantifies the impact of TP…
Multiple applications of relevance in photonics, such as spectrally efficient coherent communications, microwave synthesis or the calibration of astronomical spectrographs, would benefit from soliton microcombs operating at repetition rates <50GHz. However, attaining soliton microcombs with low repetition rates using photonic integration technologies represents a formidable challenge. Expanding the cavity volume results in a drop of intracavity intensity that can only be offset by an encompassing rise in quality factor. In addition, reducing the footprint of the microresonator on a planar inte…
Tapered and dispersion managed (DM) silicon nanophotonic waveguides are investigated for the generation of optimal ultra broadband supercontinuum (SC). DM waveguides are structures showing a longitudinally dependent group velocity dispersion that results from the variation of the waveguide width with the propagation distance. For the generation of optimal SC, a genetic algorithm has been used to find the best dispersion map. This allows for the generation of highly coherent supercontinuums that span over 1.14 octaves from 1300 nm to 2860 nm and 1.25 octaves from 1200 nm to 2870 nm at -20 dB le…
The precise measurement of the gain lifetime at a specific wavelength holds significant importance for understanding the properties of photonic devices and further improving their performances. Here, we show that the evolution of gains can be well characterized by measuring linewidth changes of an optical mode in a microresonator; this method cannot be achieved using time-resolved photoluminescence (PL) spectroscopy. We use an erbium-doped high-Q whispering-gallery microresonator to show the feasibility of this method. With the increase of time after the pump laser is turned off, the transmiss…
Terahertz (THz) technology is rapidly evolving, and the advancement of data and information processing devices is essential. Silicon THz microresonators provide perfect platforms to develop compact and integrated devices that could transform THz technology. Here we present a systematic study on the key figure of merit of silicon THz disc microresonators - the quality factor (Q-factor) - in dependence on the substrate's resistivity. Our results show that the Q-factor depends linearly on the resistivity and a variation in resistivity from 10k$Ω$cm to 15k$Ω$cm changes the Q-factor from 50k to 76k…
An outstanding challenge for color center-based quantum information processing technologies is the integration of optically-coherent emitters into scalable thin-film photonics. Here, we report on the integration of near-transform-limited silicon vacancy (V$_{\text{Si}}$) defects into microdisk resonators fabricated in a CMOS-compatible 4H-Silicon Carbide-on-Insulator platform. We demonstrate a single-emitter cooperativity of up to 0.8 as well as optical superradiance from a pair of color centers coupled to the same cavity mode. We investigate the effect of multimode interference on the photon …
A hollow bottle-like microresonator (BLMR) with ultra-high quality factor is fabricated from a microcapillary with nearly parabolic profile. At 1.55 $μm$ pumping, degenerate four-wave mixing can be observed for a BLMR of diameter 102 $μ$m. The parabolic profile of the BLMR guarantees a nearly zero waveguide dispersion, which is theoretically discussed in detail. From the simulation, at 1.55 $μ$m wavelength in such a BLMR, the fundamental bottle mode is in the anomalous dispersion regime, whilst the ordinary whispering gallery mode (WGM) confined at the center of the BLMR is in the normal dispe…
We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO_2 laser irradiation. The integrated microresonator maintains a high Q-facto…
We propose a kind of plasmonic whispering gallery modes highly localized on the exterior surface of a metal-coated microresonator. This exterior (EX) surface mode possesses high quality factors at room temperature, and can be efficiently excited by a tapered fiber. The EX mode can couple to an interior (IN) mode and this coupling produces a strong anti-crossing behavior, which not only allows conversion of IN to EX modes, but also forms a long-lived anti-symmetric mode. As a potential application, the EX mode could be used for a biosensor with a sensitivity high up to 500 nm per refraction ind…
We describe a reproducible method of fabricating adiabatic tapers with 3-4 micron diameter. The method is based on a heat-and-pull rig, whereby a CO2 laser is continuously scanned across a length of fiber that is being pulled synchronously. Our system relies on a CO2 mirror mounted on a geared stepper motor in order to scan the laser beam across the taper region. We show that this system offers a reliable alternative to more traditional rigs incorporating galvanometer scanners. We have routinely obtained transmission losses between 0.1 and 0.3 dB indicating the satisfactory production of adiab…
The implementation of optomechanical devices in silicon-on-insulator (SOI), the canonical silicon photonics technology is seriously hampered by the strong phonon leakage into the silica under-cladding. This limitation has been partially circumvented by total or partial removal of the silica under-cladding to form Si membranes or pedestal waveguides. However, this approach complicates integration with standard silicon optoelectronics circuitry, limiting the versatility and application of the strategy. Here, we propose and demonstrate a new strategy to confine photons and phonons in SOI without …
The generation of temporal cavity solitons in microresonators results in low-noise optical frequency combs which are critical for applications in spectroscopy, astronomy, navigation or telecommunications. Breather solitons also form an important part of many different classes of nonlinear wave systems with a localized temporal structure that exhibits oscillatory behavior. To date, the dynamics of breather solitons in microresonators remains largely unexplored, and its experimental characterization is challenging. Here, we demonstrate the excitation of breather solitons in two different microre…
Nowadays, Information Photonics is extensively studied and sees applications in many fields. The interest in this breakthrough technology is mainly stimulated by the possibility of achieving real-time data processing for high-bandwidth applications, still implemented through small-footprint devices that would allow for breaking the limit imposed by Moore's law. One potential breakthrough implementation of information photonics is via integrated photonic circuits. Within this approach, the most suitable computational scheme is achieved by integrated photonic neural networks. In this chapter, we…
