A self-consistent 1-D model was developed to study the effects of non-local electron conductivity on power absorption and plasma density profiles in a planar inductively coupled argon discharge at low pressures (< 10 mTorr). The model consisted of three modules: (1) an electron energy distribution function (EEDF) module to compute the non-Maxwellian EEDF, (2) a non-local electron kinetics module to predict the non-local electron conductivity, RF current, electric field and power deposition profiles in the non-uniform plasma, and (3) a heavy species transport module to solve for the ion density and velocity profiles as well as the metastable density. Results using the non-local electron conductivity model were compared with predictions of a local theory (Ohm's law), under otherwise identical conditions. The RF current, electric field, and power deposition profiles were very different, especially at 1 mTorr for which the effective electron mean free path was larger than the skin depth. However, the plasma density profiles were almost identical (within 10%) for the same total power deposition in the plasma. This result suggests that, for computing plasma density profiles, a local conductivity model (Ohm's law), with much reduced computational expense, may be employed even in the non-local regime.
Electron temperature for inductively RF post-discharge of pure neon (Ne) with a newly reactor design was presented in comparison for two different methods. Optical emission spectroscopy (OES) was applied for characterizations of inductively RF Ne plasma at pressures between 0.17mbar and 1.4mbar for newly reactor type. Discharge and post-discharge were generated with an RF power supply at a frequency of 13.56MHz and output powers of 100, 160 and 200W. Spectra were evaluated in the range 200-1200nm by an optical spectrometer. At low pressure, the main spectral features reported were the waveleng…
The importance of accounting for an ambipolar electrostatic potential or a non-uniform density profile for modelling of inductively coupled discharges is demonstrated. A drastic enhancement is observed of the power transfer into plasma for low-collisional, low-pressure, non-local discharges with non-uniform electron density profiles under the condition of bounce resonance. This enhanced plasma heating is attributed to the increase of the number of resonant electrons, for which the bounce frequency inside the potential well is equal to the rf field frequency.
The discharge structure of inductively coupled plasma is studied via fluid simulation and analytic theory collaboration. At low pressure, the discharge is stratified by the double layer, which is modelled as dipole moment. The parabolic profile is formed in the discharge core when recombination loss is negligible and both the electron and anions are the Boltzmann balanced. At increasing the pressure, the main characteristics, i.e., parabolic, elliptic and flat-topped profile, are experienced, predicted by the simulation and analytics. Self-coagulation is accompanied at all considered pressures…
Discharge structure refers to the morphology of different plasma quantities, such as electron temperature, reaction rate, plasma potential, mass flux, net charge and species density, which are determined by plasma transport mechanism and chemical processes. This morphology is rather difficult to refine in complex electronegative plasma for it is contained in a multiple-physics-field coupled system. Regarding this difficulty, the combination of self-consistent simulation, theory analysis and experimental diagnostic of this system is needed. In the scope of present article, the fluid simulation …
Recently a novel concept for collisionless electron heating and plasma generation at low pressures was proposed theoretically (U Czarnetzki and Kh Tarnev, Phys. Plasmas 21 (2014) 123508). It is based on periodically structured vortex fields which produce certain electron resonances in velocity space. A more detailed investigation of the underlying theory is presented in a companion paper (U Czarnetzki, submitted to PSST (2018), arXiv:1806.00505). Here, the new concept is experimentally realized for the first time by the INCA (INductively Coupled Array) discharge. The periodic vortex fields are…
A self-consistent 1-D model was developed to study the effect of the electron energy distribution function (EEDF) on power deposition and plasma density profiles in a planar inductively coupled plasma (ICP) in the non-local regime (pressure < 10 mTorr). The model consisted of three modules: (1) an electron energy distribution function (EEDF) module to compute the non-Maxwellian EEDF, (2) a non-local electron kinetics module to predict the non-local electron conductivity, RF current, electric field and power deposition profiles in the non-uniform plasma, and (3) a heavy species transport module…
Multi-physics modeling of non-equilibrium phenomena in inductively coupled plasma discharges: Part I. A state-to-state approach
Center for Hypersonics and Entry Systems Studies (CHESS)（高超音速与进入系统研究中心）；Department of Aerospace Engineering（航空航天工程系）；University of Illinois at Urbana-Champaign（伊利诺伊大学厄巴纳-香槟分校）
Developing large-area inductively coupled plasma sources requires deviation from the standard coil concepts and the development of advanced antenna designs. First steps in this direction employ periodic array structures. A recent example is the Inductively Coupled Array (INCA) discharge, where use is made of the collisionless electron heating in the electric field of a periodic array of vortex fields. Naturally, the efficiency of such discharges depends on the how well the experimental array realizes the theoretically prescribed field design. In this work two diagnostic methods are employed to…
Multi-physics modeling of non-equilibrium phenomena in inductively coupled plasma discharges: Part II. Multi-temperature approach
Center for Hypersonics and Entry Systems Studies (CHESS)（高超音速与进入系统研究中心）；Department of Aerospace Engineering（航空航天工程系）；University of Illinois at Urbana-Champaign（伊利诺伊大学厄巴纳-香槟分校）
A versatile linear dusty (complex) plasma device is designed to study the transport and dynamical behavior of dust particles in a large volume. Diffused inductively coupled plasma is generated in the background of argon gas. A novel technique is used to introduce the dust particles in the main plasma by striking a secondary direct current (DC) glow discharge. These dust particles are found to get trapped in an electrostatic potential well which is formed due to the combination of the ambipolar electric field caused by diffusive plasma and the field produced by the charged glass wall of the vac…
Control of Electron Energy Distribution Functions by Current Waveform Tailoring in Inductively Coupled Radio Frequency Plasmas
State Key Laboratory of Advanced Electromagnetic Technology, International Joint Research Laboratory of Magnetic Confinement Fusion and Plasma Physics, School of Electrical and Electronic Engineering, Huazhong University of Science and Technology（华中科技大学电气与电子工程学院，电磁场与微波技术全国重点实验室，磁约束聚变等离子体物理国际联合研究中心）；School of Physics, Huazhong University of Science and Technology（华中科技大学物理学院）；Chair of Applied Electrodynamics and Plasma Technology, Faculty of Electrical Engineering and Information Sciences, Ruhr University Bochum（鲁尔大学波鸿分校电气工程与信息科学学院应用电动力学和等离子体技术教席）；School of Physics and Mechanics, Wuhan University of Technology（武汉理工大学物理学与机械学院）
Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive coupling brings the advantage of a pure and dense plasma. The microwave excitation allows furthermore miniaturization and generation of low temperature plasmas. The present paper shows the state of the art of the research on such sources, demonstrating their work up to atmospheric pressure.
In this paper we present the complete derivation of the effective contour model for electrical discharges which appears as the asymptotic limit of the minimal streamer model for the propagation of electric discharges, when the electron diffusion is small. It consists of two integro-differential equations defined at the boundary of the plasma region: one for the motion and a second equation for the net charge density at the interface. We have computed explicit solutions with cylindrical symmetry and found the dispersion relation for small symmetry-breaking perturbations in the case of finite re…
The stability theory of the skin layer plasma of the inductive discharge is developed for the case when the electron quiver velocity in RF wave is of the order of or is larger than the electron thermal velocity. This theory is grounded on the methodology of the oscillating modes, which accounts for the oscillation motion of the electron component relative to the unmovable ions in the spatially inhomogeneous RF field of the skin layer. The theory predicts the existence the instability of the parametric type in a skin layer with the growth rate comparable with frequency. This instability stems f…
The electric conductivity, HV discharge triggering and guiding capabilities of filaments at 3.9 micrometer in air are investigated in the perspective of lightning control applications, and compared to near-IR filaments in identical conditions
The Maxwell time is a typical time scale for the screening of an electric field in a medium with a given conductivity. We introduce a generalization of the Maxwell time that is valid for gas discharges: the \emph{ionization screening time}, that takes the growth of the conductivity due to impact ionization into account. We present an analytic estimate for this time scale, assuming a planar geometry, and evaluate its accuracy by comparing with numerical simulations in 1D and 3D. We investigate the minimum plasma density required to prevent the growth of streamers with local field enhancement, a…
For low-pressure discharges, when the electron mean free path is larger or comparable with the discharge length, the electron dynamics is essentially nonlocal. Moreover, the electron energy distribution function (EEDF) deviates considerably from a Maxwellian. Therefore, an accurate kinetic description of the low-pressure discharges requires knowledge of the nonlocal conductivity operator and calculation of the nonMaxwellian EEDF. The previous treatments made use of simplifying assumptions: a uniform density profile and a Maxwellian EEDF. In the present study a self-consistent system of equatio…
A novel electron heating mechanism based on periodically structured vortex fields induced in a plane was first proposed in 2014 [U. Czarnetzki and Kh. Tarnev, Physics of Plasmas 21, 123508 (2014)]. This theoretical concept has now been realized in an experiment which confirms efficient collisionless heating in such array structures [Ph. Ahr, T.V. Tsankov, J. Kuhfeld, U. Czarnetzki, submitted to Plasma Sources Science and Technology, arXiv:1806.02043v1 (2018)]. The new concept is called "Inductively Coupled Array": INCA. Here, the physical mechanism behind the collisionless (stochastic) heating…
A parametric study of an underwater pulsed plasma discharge in pin-to-pin electrode configuration has been performed. The influence of two parameters has been reported, the water conductivity (from 50 to 500 $μ$S/cm) and the applied voltage (from 6 to 16 kV). Two complementary diagnostics, time resolved refractive index-based techniques and electrical measurements have been performed in order to study the discharge propagation and breakdown phenomena in water according to the two parameters. A single high voltage of duration between 100 $μ$S and 1 ms is applied between two 100 $μ$m diameter pl…
Time resolved electron density measurements in pulsed RF discharges are shown using a hairpin resonance probe using low cost electronics, on par with normal Langmuir probe boxcar mode operation. Time resolution of less than one microsecond has been demonstrated. A signal generator produces the applied microwave frequency; the reflected waveform is passed through a directional coupler and filtered to remove the RF component. The signal is heterodyned with a frequency mixer and read by an oscilloscope. At certain points during the pulse, the plasma density is such that the applied frequency is t…
The negative power absorption in low pressure plasmas is investigated by means of an analyical model which couples Boltzmann's equation and the quasi-stationary Maxwell's equation. Exploiting standard Hilbert space methods an explicit solution for both, the electric field and the distribution function of the electrons for a bounded discharge configuration subject to an unsymmetrical excitation has been found for the first time. The model is applied to a low pressure inductively coupled plasma discharge. In this context particularly the anomalous skin effect and the effect of phase mixing is di…
We investigate the influence of ultrashort laser filaments on high-voltage discharges and spark-free unloading at various repetition rates and wind conditions. For electric fields well below, close to and above the threshold for discharges, we respectively observe remote spark-free unloading, discharge suppression, and discharge guiding. These effects rely on an indirect consequence of the thermal deposition, namely the fast dilution of the ions by the shockwave triggered by the filament at each laser shot. This dilution drastically limits recombination and increases the plasma channel conduct…
We report on the observation of the self-excited dust density waves in the dc discharge complex plasma. The experiments were performed under microgravity conditions in the Plasmakristall-4 facility on board the International Space Station. In the experiment, the microparticle cloud was first trapped in an inductively coupled plasma, then released to drift for some seconds in a dc discharge with constant current. After that the discharge polarity was reversed. DC plasma containing a drifting microparticle cloud was found to be strongly non-uniform in terms of microparticle drift velocity and pl…
A 13.56 MHz RF discharge in hydrogen was studied within the pressure range of 1-17 10 Pa, and at power range of 400-1000 W. The electron energy distribution function and 18 electron density were measured by a Langmuir probe. The gas temperature was determined by 19 the Fulcher-$α$ system in pure H2, and by the second positive system of nitrogen using N2 as the 20 probing gas. The gas temperature was constant and equal to 450 $\pm$ 50 K in the Capacitively 21 Coupled Plasma mode (CCP), and it was increasing with pressure and power in the Inductively 22 Coupled Plasma mode (ICP). Also the vibrat…
We report on the first detailed analysis of large three dimensional (3D) complex plasma structures in experiments performed in pure rf and combined rf+dc discharge modes. Inductively coupled plasma (ICP) is generated by an rf coil wrapped around the vertically positioned cylindrical glass tube at a pressure of 0.3 mbar. In addition, dc plasma can be generated by applying voltage to the electrodes at the ends of the tube far from the rf coil. The injected monodisperse particles are levitated in the plasma below the coil. A scanning laser sheet and a high resolution camera are used to determine …
A Global Enhanced Vibrational Kinetic (GEVKM) model is presented for a new High Current Negative Hydrogen Ion Source (HCNHIS) developed by Busek Co. Inc. and Worcester Polytechnic Institute. The HCNHIS consists of a high-pressure radio-frequency discharge (RFD) chamber where high-lying vibrational states of the hydrogen molecules are produced, a bypass system, a nozzle, and a low-pressure negative hydrogen ion production region where $\text{H}^-$ are generated by the dissociative attachment of low energy electrons to rovibrationally excited hydrogen molecules. The GEVKM is developed from momen…
Numerical analysis of three-dimensional magnetohydrodynamic effects in an inductively coupled plasma wind tunnel
Center for Hypersonics and Entry Systems Studies (CHESS)（高超声速与进入系统研究中心）；Department of Aerospace Engineering（航空航天工程系）；University of Illinois Urbana-Champaign（伊利诺伊大学厄巴纳-香槟分校）
The conditions for the excitation of current and voltage oscillations in the plasma of a three-electrode current and voltage stabilizer are experimentally investigated. It was found that in the regimes under consideration, the plasma has negative conductivity, which causes oscillations. A highly efficient method for suppressing plasma instabilities is proposed, based on controlling the sign of differential plasma conductivity by adjusting the concentration of slow electrons using an external electrode. The proposed method makes it possible to achieve a high level of stability of the energy cha…
Electron heating and ionization dynamics in capacitively coupled radio frequency (RF) atmospheric pressure microplasmas operated in helium are investigated by Particle in Cell simulations and semi-analytical modeling. A strong heating of electrons and ionization in the plasma bulk due to high bulk electric fields are observed at distinct times within the RF period. Based on the model the electric field is identified to be a drift field caused by a low electrical conductivity due to the high electron-neutral collision frequency at atmospheric pressure. Thus, the ionization is mainly caused by o…
In this paper, the collective dynamics of the large aspect ratio dusty plasma is studied over a wide range of discharge parameters. An inductively coupled diffused plasma, which creates an electrostatic trap to confine the negatively charged grains, is used to form a large volume (or large aspect ratio) dusty plasma at low pressure. For introducing the dust grains into the potential well, a unique technique using a secondary DC glow discharge plasma is employed. The dust dynamics is recorded in a 2-dimension (2D) plane at a given axial location. The dust fluid exhibits wave like behavior at lo…
Regular oscillations of the central electron temperature have been observed by means of ECE and SXR diagnostics during non-inductively driven discharges on Tore Supra. These oscillations are sustained by LHCD, do not have a helical structure and, therefore, cannot be ascribed as MHD phenomena. The most probable explanation of this oscillating regime (O-regime) is the assumption that the plasma current density (and, thus, the q-profile) and the electron temperature evolve as a non-linearly coupled predator-pray system. The integrated modelling code CRONOS has been used to demonstrate that the c…
We present a new multi-fluid, multi-temperature plasma solver with adaptive Cartesian mesh (ACM) based on a full-Newton (non-linear, implicit) scheme for collisional low-temperature plasma. The particle transport is described using the drift-diffusion approximation for electrons and ions coupled to Poisson equation for electric field. In addition, the electron-energy transport equation is solved to account for electron thermal conductivity, Joule heating, and energy loss of electrons in collisions with neutral species. The rate of electron-induced ionization is a function of electron temperatu…
Emerging contaminants (ECs) have come out as the latest class of environmental contaminants, which are highly recalcitrant and toxic in nature. Currently, no suitable rectification methods are available against the ECs, resulting in a continuous increase in their concentration. Non-thermal plasma, as an advanced oxidation process, has been emerging as a promising technology against the ECs treatment. In the present work, a detailed experimental study is carried out to evaluate the efficacy of a non-thermal plasma jet with two dyes, Rhodamine B and Methylene Blue, as model contaminants. The pla…
HELicon Experiment for Negative ion source (HELEN-I) with single driver is developed with a focus on the production of negative hydrogen ions. In the Helicon wave heated plasmas, very high plasma densities ($\sim10^{19} m^{-3}$) can be attained with electron temperatures as low as $\sim$1 eV in the downstream region. These conditions favor the production of negative hydrogen ions. In HELEN-I device at IPR, helicon plasma is produced using Hydrogen gas in a diverging magnetic field, created by a permanent ring magnet. RF Power ($P_{RF}$) of 800-1000W at 13.56 MHz frequency is applied to a Nagoy…
Electromagnetic turbulence in EAST plasmas with internal transport barrier
CAS Key Laboratory of Frontier Physics in Controlled Nuclear Fusion, School of Nuclear Sciences and Technology, University of Science and Technology of China（中国科学院前沿物理国家重点实验室，核科学与技术学院，中国科学技术大学）；Institute of Physics, Chinese Academy of Sciences（中国科学院物理研究所）；Department of Physics and Astronomy, University of California, Irvine（加州大学尔湾分校物理与天文学系）
本研究通过全局非线性电磁 gyrokinetic 模拟，揭示弱反剪切 EAST 托卡马克 ITB 区域的电磁湍流特性，发现电磁效应可抑制高频 ITG 模、增强带状流剪切以降低热导率，为准确计算输运系数提供关键依据。
The magnetohydrodynamics (MHD) of protoplanetary disks are strongly subject to the non-ideal MHD effects arising from the low ionization fraction of the disk gas. A strong electric field induced by gas motions can heat ionized gas particles and can thereby affect the ionization balance in the disks. Our previous studies revealed that in dusty protoplanetary disks, the Ohmic conductivity decreases with increasing electric field strength until the electrical breakdown of the disk gas occurs. In this study, we extend our previous work to more general cases where both electric and magnetic fields …
