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TiN（111）层间传质动力学的低能电镜研究

Low-Energy Electron Microscopy Studies of Interlayer Mass Transport Kinetics on TiN(111)

S. Kodambaka, Navot Israeli, J. Bareno, W. Swiech, Kenji Ohmori, I. Petrov, J. E. Greene

备注：
26 pages, 5 figures
发表信息：
Surf. Sci. 560/1-3 pp.53-62 (2004)
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摘要：

利用低能电子显微镜原位研究了TiN（111）三维堆在1550 ~ 1700 K退火过程中的层间质量输运动力学。在每一个T，岛屿以恒定的速率衰减，而不管它们在丘中的初始位置，这表明质量在局部不守恒。从依赖于温度的岛衰变率，我们得到的活化能为2.8+/-0.3 eV。这与原子级平坦TiN（111）阶地上的2D TiN岛的衰减限制性衰减一致[Phys. Rev. Lett. 89（2002）176102]，但显著小于对于体扩散限制的螺旋阶梯生长获得的值4.5+/-0.2eV [Nature 429，49（2004）]。我们模拟的过程中，步骤流的基础上，同时考虑到一步一步的相互作用，一步渗透性，和散装质量运输。结果表明，TiN（111）台阶具有高度的可渗透性，并表现出强烈的排斥性温度依赖的台阶-台阶相互作用，其变化范围为0.003 ~ 0.076 eV-nm。控制TiN（111）丘体衰变的速率限制过程是表面扩散，而不是体扩散。

英文摘要：

In situ low-energy electron microscopy was used to study interlayer mass transport kinetics during annealing of three-dimensional (3D) TiN(111) mounds, consisting of stacked 2D islands, at temperatures T between 1550 and 1700 K. At each T, the islands decay at a constant rate, irrespective of their initial position in the mounds, indicating that mass is not conserved locally. From temperature-dependent island decay rates, we obtain an activation energy of 2.8+/-0.3 eV. This is consistent with the detachment-limited decay of 2D TiN islands on atomically-flat TiN(111) terraces [Phys. Rev. Lett. 89 (2002) 176102], but significantly smaller than the value, 4.5+/-0.2 eV, obtained for bulk-diffusion-limited spiral step growth [Nature 429, 49 (2004)]. We model the process based upon step flow, while accounting for step-step interactions, step permeability, and bulk mass transport. The results show that TiN(111) steps are highly permeable and exhibit strong repulsive temperature-dependent step-step interactions that vary between 0.003 and 0.076 eV-nm. The rate-limiting process controlling TiN(111) mound decay is surface, rather than bulk, diffusion in the detachment-limited regime.

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