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arXiv 2405.04075cond-mat.mtrl-sci
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钙钛矿的吸附控制外延

Adsorption-controlled epitaxy of perovskites

Wolfgang Braun

AI总结:

本文提出一种结合MBE与PLD优势的激光加热外延方法,可在高背景气压下实现钙钛矿氧化物的吸附控制外延生长,突破现有技术限制并具备规模化生产潜力。

摘要:

我提出在真空室中同时使用激光加热衬底和热蒸发源,工作压力范围从极高高真空(XHV)到粒子平均自由程接近或略超过源-衬底距离的压强值。该概念结合了分子束外延(MBE)和脉冲激光沉积(PLD)两种方法的优势,可在任意气体或分子束的高背景压力下实现超纯沉积,并连续改变化学计量比。理论和初步实验表明,该装置能够在分子氧背景下,以吸附控制模式生长复杂氧化物,例如SrTiO$_3$,类似于GaAs的生长方式。这一生长模式既无法通过MBE也无法通过PLD实现,使得这种激光外延方法成为探索新生长模式的独特工具,并有望制备背景杂质水平极低的调制掺杂异质结构等结构,而这些结构用现有技术无法合成。沉积室技术简单且尺寸极为紧凑,能够方便快速地切换不同材料体系,并高效合成含有腐蚀性组分的新材料。与PLD相比,该方法可以以直接的方式扩展到大型衬底尺寸,提供从研究到大规模生产的直接路径。

英文摘要:

I propose to use laser heating both for the substrate and the thermal evaporation sources in a vacuum chamber operating at pressures from XHV to values where the mean free path of the particles approaches or slightly exceeds the source-substrate distance. The concept combines the advantages of the molecular beam epitaxy (MBE) and pulsed laser deposition (PLD) methods to allow ultrapure deposition with continuous stoichiometry variation at high background pressures of arbitrary gases or molecular beams. Theory and preliminary experiments suggest that this setup is capable of growing complex oxides such as SrTiO$_3$ in the adsorption-controlled regime, similar to GaAs, in a background of molecular oxygen. This regime is neither accessible to MBE nor to PLD, making this laser epitaxy approach a unique tool to explore new growth regimes with the potential to fabricate structures such as modulation-doped heterostructures with low levels of background impurities that are impossible to synthesize with the current techniques. The technological simplicity and exceedingly compact size of the deposition chamber enable easy and rapid switching between different materials systems and the efficient synthesis of new materials that involve corrosive constituents. In contrast to PLD, the method may be scaled in a straightforward manner to large substrate sizes, providing a direct path from research to mass production.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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