arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2402.15693eess.SYcs.ARcs.SY
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光刻控制系统:信息物理系统的一个案例研究

Photolithography Control System : A Case Study For Cyber-Physical System

Youbao Zhang, Huijie Huang

AI总结:

本文以光刻控制系统为案例,论证了采用信息物理系统框架中的整体视角、基于模型设计、软硬件协同设计和持续集成可解决当前复杂分布式控制问题,并指出CPS方法是PCS发展的未来方向。

摘要:

光刻控制系统(PCS)是一个极其复杂的分布式控制系统,由数十个联网微处理器、数百个执行器、数十万个传感器以及数百万行代码组成。信息物理系统(CPS)将计算与物理过程深度融合,从更高的抽象层次应对复杂系统。PCS 是一个具有代表性的 CPS。本文指出,在 CPS 框架下进行思考——包括整体视角、基于模型的设计、硬件/软件协同设计以及持续集成——能够解决当前 PCS 中存在的问题。尽管传统嵌入式系统方法与 CPS 方法将在 PCS 中长期共存,但 CPS 方法无疑是 PCS 发展的未来。

英文摘要:

Photolithography control system (PCS) is an extremely complex distributed control system, which is composed of dozens of networked microprocessors, hundreds of actuators, hundreds of thousands of sensors, and millions of lines of code. Cyber-physical system (CPS), which deeply merges computation with physical processes together, copes with complex system from a higher level of abstraction. PCS is a representative CPS. This work points out that thinking under the framework of CPS, which includes holistic perspective, model-based design, hardware/software co-design and continuous integration, could solve the issues presented in the current PCS. Although the traditional embedded system approach and the CPS approach would be coexisting in the PCS for a long time, the CPS approach is definitely the future of the PCS development.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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