基于AlN纳米线的垂直集成压电纳米发电机
AlN Nanowire Based Vertically Integrated Piezoelectric Nanogenerators
AI总结：
本研究详细分析了基于AlN纳米线的垂直集成纳米发电机的直接压电响应，通过等效电路模型关联压电电荷、电压和阻抗，确定性能品质因数，并表明纳米线在机械传感和能量产生方面优于刚性对应物，为理解VINGs的压电特性提供实验指南。
摘要：
在本研究中，作为机械激发频率的函数，对基于AlN纳米线的垂直集成纳米发电机（VINGs）的直接压电响应进行了详细分析。我们表明，在整个研究频率范围内，在器件相同位置测得的压电电荷、压电电压和阻抗可以通过等效电路模型直接关联。我们展示的结果被用于确定基于纳米线的VINGs的性能品质因数（FoM），即用于传感的压电电压常数（g）以及用于能量收集的乘积dg，其中d是压电电荷常数。通过将这些指标与独立单晶GaN和石英基底以及溅射AlN薄膜的指标进行比较，我们表明纳米线在机械传感和能量产生方面可以优于其刚性对应物。这项工作为理解VINGs的直接压电特性提供了实验指南，并促进了使用不同材料或架构制造的纳米结构压电器件之间的定量比较。
英文摘要：
In this study, detailed analysis of the direct piezo-response of AlN nanowire-based vertically integrated nanogenerators (VINGs) is undertaken as a function of mechanical excitation frequency. We show that the piezo-charge, piezo-voltage, and impedance measured at the same position of the devices can be directly correlated through an equivalent circuit model, in the whole frequency range of investigation. Our presented results are utilized to determine the performance figures of merit (FoM) of nanowire-based VINGs, namely the piezoelectric voltage constant (g) for sensing, and the product d g for energy harvesting, where d is the piezoelectric charge constant. By comparison of these metrics with those of freestanding single crystal GaN and quartz substrates, as well as sputtered AlN thin films, we suggest that the nanowires can outperform their rigid counterparts in terms of mechanical sensing and energy generation. This work provides experimental guidelines for understanding the direct piezo-characteristics of VINGs and facilitates a quantitative comparison between nanostructured piezoelectric devices fabricated using different materials or architectures.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
