具有压电氮化铝层的硅纳米线的高频机械激励
High frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers
摘要：
基于量子的技术和应用的强劲趋势是将不同的平台结合起来，利用它们互补的技术和功能优势。微和纳米机械器件特别适合于混合集成，这是由于其在多尺度下的制造容易性以及它们与电子和光子的普遍耦合。在这里，我们报告了一个纳米机械技术平台，其中硅芯片与氮化铝层相结合。利用AlN的压电性，表面声波被注入到Si层中，其中材料已经被局部图案化和蚀刻以形成悬浮的纳米串。表征由SAW引起的纳米串垂直位移，我们发现在1 GHz的机械频率超过500 pm/V的外部激发峰值效率。利用硅光子和电子器件的长期专业知识以及SAW的鲁棒性和多功能性，我们的技术平台代表了混合量子系统的强有力的候选者。
英文摘要：
A strong trend for quantum based technologies and applications follows the avenue of combining different platforms to exploit their complementary technological and functional advantages. Micro and nano-mechanical devices are particularly suitable for hybrid integration due to the easiness of fabrication at multi-scales and their pervasive coupling with electrons and photons. Here, we report on a nanomechanical technological platform where a silicon chip is combined with an aluminum nitride layer. Exploiting the AlN piezoelectricity, Surface Acoustic Waves are injected in the Si layer where the material has been localy patterned and etched to form a suspended nanostring. Characterizing the nanostring vertical displacement induced by the SAW, we found an external excitation peak efficiency in excess of 500 pm/V at 1 GHz mechanical frequency. Exploiting the long term expertise in silicon photonic and electronic devices as well as the SAW robustness and versatility, our technological platform represents a strong candidate for hybrid quantum systems.
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