arXiv 2307.066042023-07-13physics.opticsphysics.ins-det

用于单次光谱椭偏测量的超表面阵列

Metasurface array for single-shot spectroscopic ellipsometry

Shun Wen, Xinyuan Xue, Liqun Sun, Yuanmu Yang

AI总结：

本文提出一种基于硅基超表面阵列的单次光谱椭偏测量系统，结合迭代优化重建完整Stokes偏振光谱，从而无机械运动地高精度测定薄膜厚度与折射率。

摘要：

光谱椭偏测量是一种广泛用于测量薄膜厚度和折射率的有效方法。然而，传统椭偏仪采用机械旋转偏振器和基于光栅的光谱仪进行光谱偏振检测，体积庞大、结构复杂，且无法进行实时测量。在此，我们展示了一种紧凑的、基于超表面阵列的光谱椭偏测量系统，该系统无需任何机械运动即可实现单次光谱偏振检测并准确测定薄膜特性。该硅基超表面阵列具有高度各向异性且多样的光谱响应，结合迭代优化，可高保真重建薄膜反射光的完整 Stokes 偏振光谱。随后，通过将测量结果拟合到合适的材料模型，可以高精度确定薄膜厚度和折射率。我们的方法为构建紧凑、稳健的光谱椭偏测量系统以实现薄膜特性的高通量测量开辟了一条新途径。

英文摘要：

Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. However, a conventional ellipsometer, which utilizes a mechanically rotating polarizer and grating-based spectrometer for spectropolarimetric detection, is bulky, complex, and does not allow real-time measurements. Here, we demonstrated a compact metasurface array-based spectroscopic ellipsometry system that allows single-shot spectropolarimetric detection and accurate determination of thin film properties without any mechanical movement. The silicon-based metasurface array with a highly anisotropic and diverse spectral response is combined with iterative optimization to reconstruct the full Stokes polarization spectrum of the light reflected by the thin film with high fidelity. Subsequently, the film thickness and refractive index can be determined by fitting the measurement results to a proper material model with high accuracy. Our approach opens up a new pathway towards a compact and robust spectroscopic ellipsometry system for the high throughput measurement of thin film properties.

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