具有超高响应度的石墨烯谐振式压力传感器
Graphene Resonant Pressure Sensor with Ultrahigh Responsivity
AI总结：
本文提出一种基于石墨烯纳米谐振器的谐振式压力传感器，通过在薄硅膜片上制作谐振器并保持真空环境，实现了20Hz/Pa的超高响应度和90Pa分辨率，且制造工艺简单、可与CMOS集成。
摘要：
石墨烯具有良好的机械性能，包括较大的杨氏模量，使其成为许多谐振传感应用的理想材料。然而，由于制造、封装和包装方面的困难，基于石墨烯的传感器的发展一直受到限制。本文报道了一种基于石墨烯纳米谐振器的谐振式压力传感器。该石墨烯纳米谐振器制作在薄硅膜片上，硅膜片因两侧压差而产生形变。形变引起的应变变化导致石墨烯纳米谐振器的谐振频率发生偏移。压力传感实验表明，该传感器实现了创纪录的20Hz/Pa高响应度，分辨率为90Pa。该传感方案的分辨率为压力传感器满量程的0.003%。这一卓越性能归因于两个因素：为纳米谐振器维持高质量的真空环境，以及通过薄硅膜片引入外界刺激。所提出的压力传感器设计可灵活调整响应度和量程以满足需求。该制造方法简单，并具有与标准CMOS工艺集成的潜力。创新的基底封装方式使谐振器的应变能够与压力相耦合。
英文摘要：
Graphene has good mechanical properties including large Young's modulus, making it ideal for many resonant sensing applications. Nonetheless, the development of graphene based sensors has been limited due to difficulties in fabrication, encapsulation, and packaging. Here we report a graphene nanoresonator based resonant pressure sensor. The graphene nano resonator is fabricated on a thin silicon diaphragm that deforms due to pressure differential across it. The deformation-induced strain change results in a resonance frequency shift of the graphene nano resonator. The pressure sensing experiments demonstrate a record high responsivity of 20Hz/Pa with a resolution of 90Pa. The resolution of the sensing scheme is 0.003% of the full-scale range of the pressure sensor. This exceptional performance is attributed to two factors: maintaining a high-quality vacuum environment for the nanoresonator and introducing stimuli through a thin silicon diaphragm. The proposed pressure sensor design provides flexibility to adjust responsivity and range as needed. The fabrication method is simple and has the potential to be integrated with standard CMOS fabrication. The innovative substrate packaging allows the coupling of the resonator's strain with pressure.
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