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arXiv 2302.08030cond-mat.mes-hallphysics.app-ph
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基于石墨烯诱导无辐射跃迁的高灵敏度石墨烯MEMS力和加速度传感器

High-sensitivity graphene MEMS force and acceleration sensor based on graphene-induced non-radiative transition

Guanghui Lia, Fengman Liu, Shengyi Yanga, Jiang-Tao Liu, Weimin Li, Zhenhua Wu

摘要:

研究了利用石墨烯诱导无辐射跃迁的微机电系统(MEMS)力和加速度传感器。石墨烯诱导的非辐射跃迁对距离非常敏感,并且石墨烯带的偏转对施加的力或加速度高度敏感。因此,可以实现高灵敏度MEMS传感器,检测石墨烯带的1 nm的偏转、0.1 pN的力和0.1 mg的加速度。MEMS传感器的尺寸只有几十微米,可以通过光照射充电,而无需连接电源。此外,它允许长距离检测,即,可以省略无线发射器电路。因此,它将在微型智能设备、可穿戴设备、生物医学系统等领域具有重大的应用前景。

英文摘要:

The micro-electromechanical-system (MEMS) force and acceleration sensor utilizing the graphene-induced non-radiative transition was investigated. The graphene-induced non-radiative transition is very sensitive to the distance, and the deflection of the graphene ribbon is highly susceptive to applied force or acceleration. Thus, a high-sensitivity MEMS sensor can be achieved with detecting the graphene ribbon's deflection of 1 nm, the force of 0.1 pN, and the acceleration of 0.1 mg. The MEMS sensor, with a size of only tens of microns, can be charged by light irradiation without connecting power sources. In addition, it allows long-distance detection, i.e., wireless transmitter circuit can be omitted. Therefore, it will have significant application prospects in the fields of micro-smart devices, wearable devices, biomedical systems, and so on.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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