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arXiv 2301.07579astro-ph.IMphysics.ins-det
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用于微波动态电感探测器研制的高均匀性TiN/Ti/TiN多层膜

High-uniformity TiN/Ti/TiN multilayers for the development of Microwave Kinetic Inductance Detector

Mario De Lucia, E. Baldwin, G. Ulbricht, J. D. Piercy, O. Creaner, C. Bracken, T. P. Ray

摘要:

微波动力学电感探测器(MKIDS)是一类同时具有能量分辨率、时间分辨率和空间分辨率的超导低温探测器。MKID阵列的像素产率通常是MKID阵列表征中的关键品质因数。目前,对于用于检测光学和近红外光子的MKID,只有最好的阵列显示出高达75- 80%的像素产率。用于制造MKID阵列的超导膜的均匀性通常被认为是限制阵列的像素产量的主要因素。在本文中,我们将提出的TiN/Ti/TiN多层膜沉积在廷德尔国家研究所的均匀性的数据,并比较这些结果与一个统计模型,评估不均匀性如何影响像素产量的阵列。

英文摘要:

Microwave Kinetic Inductance Detectors (MKIDs) are a class of superconducting cryogenic detectors that simultaneously exhibit energy resolution, time resolution and spatial resolution. The pixel yield of MKID arrays is usually a critical figure of merit in the characterisation of an MKIDs array. Currently, for MKIDs intended for the detection of optical and near-infrared photons, only the best arrays exhibit a pixel yield as high as 75-80%. The uniformity of the superconducting film used for the fabrication of MKIDs arrays is often regarded as the main limiting factor to the pixel yield of an array. In this paper we will present data on the uniformity of the TiN/Ti/TiN multilayers deposited at the Tyndall National Institute and compare these results with a statistical model that evaluates how inhomogeneities affect the pixel yield of an array.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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