氮化钛动态电感探测器的光子噪声限制灵敏度
Photon-noise limited sensitivity in titanium nitride kinetic inductance detectors
摘要：
本文研究了由TiN/Ti/TiN三层超导薄膜制成的馈电喇叭耦合微波动力学电感探测器（MKID）在亚毫米波段的光子噪声限制性能。绝缘体上硅晶片背面的微加工产生了四分之一波长的背短路，该背短路针对250 \micron的有效耦合进行了优化。当入射光功率为$>$ ~0.5~pW时，利用频率读出和观察变温黑体源，我们测量了与光子噪声一致的器件噪声，对应于噪声等效功率$>$ ~3 $\times 10^{-17}$ W/ $\sqrt{\mathrm{Hz}}$。这种灵敏度使这些器件适合在这些波长下的宽带光度应用。
英文摘要：
We demonstrate photon-noise limited performance at sub-millimeter wavelengths in feedhorn-coupled, microwave kinetic inductance detectors (MKIDs) made of a TiN/Ti/TiN trilayer superconducting film, tuned to have a transition temperature of 1.4~K. Micro-machining of the silicon-on-insulator wafer backside creates a quarter-wavelength backshort optimized for efficient coupling at 250~\micron. Using frequency read out and when viewing a variable temperature blackbody source, we measure device noise consistent with photon noise when the incident optical power is $>$~0.5~pW, corresponding to noise equivalent powers $>$~3$\times 10^{-17}$ W/$\sqrt{\mathrm{Hz}}$. This sensitivity makes these devices suitable for broadband photometric applications at these wavelengths.
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